Formation of micron and submicron structures on a zirconium oxide surface exposed to nanosecond laser radiation

被引：9
|
作者：
Ganin, D. V. [1 ]
Mikolutskiy, S. I. [2 ]
Tokarev, V. N. [3 ]
Khomich, V. Yu [2 ]
Shmakov, V. A. [3 ]
Yamshchikov, V. A. [2 ]
机构：
[1] Russian Acad Sci, Phys Instrumentat Ctr, AM Prokhorov Gen Phys Inst, Moscow 142190, Russia
[2] Russian Acad Sci, Inst Electrophys & Elect Power, St Petersburg 191186, Russia
[3] Russian Acad Sci, AM Prokhorov Gen Phys Inst, Moscow 119991, Russia
来源：
QUANTUM ELECTRONICS | 2014年 / 44卷 / 04期
关键词：
nanosecond laser radiation; zirconium dioxide; submicron structures; thermal stress;
D O I：
10.1070/QE2014v044n04ABEH015219
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Possibility of forming quasi-periodic structures of micron and submicron dimensions on a surface of zirconium dioxide under the action of eximer ArF laser radiation is shown experimentally and theoretically.
引用
收藏
页码：317 / 321
页数：5
相关论文
共 50 条
  • [1] Formation of submicron structures on the surface of zirconium dioxide under illumination of nanosecond laser
    Yu Khomich V.
    Urlichich Y.M.
    Shmakov V.A.
    Tokarev V.N.
    Galstyan A.M.
    Mikolutskiy S.I.
    Malinskiy T.V.
    Ganin D.V.
    Inorg. Mater.: Appl. Res., 2013, 3 (201-204): : 201 - 204
  • [2] The formation of submicron structures on the surface of amorphous silicon films by nanosecond pulsed radiation of a laser line generator
    V. V. Kushnir
    M. V. Rubashkina
    A. M. Svetlichnyi
    O. B. Spiridonov
    Kushnir, V. V. (v.v.kushnir@gmail.com), 2012, Izdatel'stvo Nauka (07): : 9 - 10
  • [3] Formation of carbon submicron structures and nanostructures on the surface of cold substrates exposed to laser radiation in air
    Arakelian, S. M.
    Gerke, M. N.
    Kutrovskaya, S. V.
    Kucherik, A. O.
    Prokoshev, V. G.
    QUANTUM ELECTRONICS, 2008, 38 (01) : 73 - 76
  • [4] Modification of a Germanium Surface Exposed to Radiation of a Nanosecond Ultraviolet Laser
    Zheleznov V.Y.
    Malinsky T.V.
    Mikolutsky S.I.
    Rogalin V.E.
    Filin S.A.
    Khomich Y.V.
    Yamshchikov V.A.
    Kaplunov I.A.
    Ivanova A.I.
    Russian Microelectronics, 2021, 50 (08) : 649 - 656
  • [5] Properties of a silicon surface exposed to nanosecond laser-radiation pulses
    Pilipenko V.A.
    Vecher D.V.
    Gorushko V.A.
    Syakerskii V.S.
    Petlitskaya T.V.
    Journal of Engineering Physics and Thermophysics, 2008, 81 (03) : 622 - 626
  • [6] Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow
    Uglov, VV
    Anishchik, VM
    Astashynski, VV
    Astashynski, VM
    Ananin, SI
    Askerko, VV
    Kostyukevich, EA
    Kuz'mitski, AM
    Kvasov, NT
    Danilyuk, AL
    JETP LETTERS, 2001, 74 (04) : 213 - 215
  • [7] Formation of submicron cylindrical structures at silicon surface exposed to a compression plasma flow
    V. V. Uglov
    V. M. Anishchik
    V. V. Astashynski
    V. M. Astashynski
    S. I. Ananin
    V. V. Askerko
    E. A. Kostyukevich
    A. M. Kuz’mitski
    N. T. Kvasov
    A. L. Danilyuk
    Journal of Experimental and Theoretical Physics Letters, 2001, 74 : 213 - 215
  • [8] Formation of Periodical Sub-micron Sized Structures on Silicon by Interfered Nanosecond Laser Pulses
    Hu, Yongxiang
    Zhang, Heng
    Yao, Zhenqiang
    MANUFACTURING SCIENCE AND ENGINEERING, PTS 1-5, 2010, 97-101 : 3803 - +
  • [9] Submicron regular structures forming by nanosecond laser intracavity treatment
    Valyavko, VV
    Osipov, VP
    COMPUTER-CONTROLLED MICROSHAPING, 1999, 3822 : 34 - 39
  • [10] Controlling Micron and Submicron Scale Laser Induced Surface Structures on Stainless Steel with Industrial Femtosecond Lasers
    Fraggelakis, Fotis
    Mincuzzi, Girolamo
    Lopez, John
    Kling, Rainer
    Manek-Honninger, Inka
    JOURNAL OF LASER MICRO NANOENGINEERING, 2018, 13 (03): : 206 - 210
12345