共 20 条
[4]
Extended defects in shallow implants
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
2003, 76 (07)
:1025-1033
[6]
Advanced front-end processes for the 45 nm CMOS technology node
[J].
MATERIALS SCIENCE AND ENGINEERING B-SOLID STATE MATERIALS FOR ADVANCED TECHNOLOGY,
2004, 114
:118-129
[9]
Ion implantation damage and crystalline-amorphous transition in Ge
[J].
APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING,
2011, 103 (02)
:323-328