Development of a double fiber probe with a single fiber Bragg grating for dimensional measurement of microholes with high aspect ratios

被引:15
作者
Cui, Jiwen [1 ]
Feng, Kunpeng [1 ]
Li, Junying [1 ]
Tan, Jiubin [1 ]
机构
[1] Harbin Inst Technol, Ctr Ultra Precis Optoelect Instruments, Harbin 150080, Peoples R China
基金
中国国家自然科学基金;
关键词
Aspect ratio - Probes;
D O I
10.1364/OL.39.002868
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
A fiber Bragg grating (FBG)-based probe is developed by designing a novel double fiber structure to make the probe sensitive to both axial and radial contact displacements. A matched FBG pair interrogation system for the probe is modeled, and the best matched initial condition is found to make the probing system work in the linear and most sensitive mode. Actual measurements of ring gauges and fuel injection nozzles indicate that, for a microhole with an aspect ratio of greater than 14: 1, an axial resolution of 8 nm and a radial resolution of 30 nm can be achieved with the developed probe. It is therefore concluded that the double fiber probe with a single FBG developed can be used to measure high aspect ratio microholes. (C) 2014 Optical Society of America
引用
收藏
页码:2868 / 2871
页数:4
相关论文
共 12 条
[1]  
Cui J., 2013, J MOD OPTIC, V21, P2001
[2]  
Cui J., 2011, OPT LETT, V36, P23
[3]   Accurate and traceable measurement of nano- and microstructures [J].
Dai, GL ;
Pohlenz, F ;
Xu, M ;
Koenders, L ;
Danzebrink, HU ;
Wilkening, G .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2006, 17 (03) :545-552
[4]   Development of a contact probe incorporating a Bragg grating strain sensor for nano coordinate measuring machines [J].
Ji, H. ;
Hsu, H-Y ;
Kong, L. X. ;
Wedding, A. B. .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2009, 20 (09)
[5]   Form measurements of micro-holes [J].
Kao, Chen-Chun ;
Shih, Albert J. .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2007, 18 (11) :3603-3611
[6]   Analysis of measurement accuracy of quadrilateral hole using optical inner-diameter-measuring machine [J].
Liangpanich, E ;
Akiyama, N ;
Yoshida, M ;
Kuwabara, K .
OPTICAL ENGINEERING, 2003, 42 (09) :2568-2575
[7]   Single-longitudinal-mode fiber ring laser employing a polarization-maintaining fiber Bragg grating made by the pre-stress method for wavelength match [J].
Lin, Huizu ;
Ma, Lina ;
Hu, Yongming ;
Hu, Zhengliang ;
Yao, Qiong .
OPTICS AND LASERS IN ENGINEERING, 2013, 51 (07) :822-825
[8]   A new micro/nano displacement measurement method based on a double-fiber Bragg grating (FBG) sensing structure [J].
Liu, Fangfang ;
Fei, Yetai ;
Xia, Haojie ;
Chen, Lijuan .
MEASUREMENT SCIENCE AND TECHNOLOGY, 2012, 23 (05)
[9]  
Masuzawa T, 1993, CIRP ANN-MANUF TECHN, V42, P589, DOI DOI 10.1016/S0007-8506(07)62516-5
[10]   Nondestructive Evaluation of Diesel Spray Holes Using Piezoresistive Sensors [J].
Peiner, Erwin ;
Doering, Lutz .
IEEE SENSORS JOURNAL, 2013, 13 (02) :701-708