Optimization of A Novel Micro-hotplate for Gas Sensor

被引：0

作者：

Li, Changchun

Zhang, Xiaobo ^{[1
]}

Liu, Li ^{[1
]}

机构：

[1] Jilin Univ, Coll Phys, State Key Lab Superhard Mat, Changchun 130012, Peoples R China

来源：

APPLIED MATERIALS AND TECHNOLOGIES FOR MODERN MANUFACTURING, PTS 1-4 | 2013年 / 423-426卷

关键词：

micro-hotplate; Finite element analysis; MEMS; temperature distributing; magnetic field distribution;

D O I：

10.4028/www.scientific.net/AMM.423-426.2317

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A novel design of micro-hotplate is proposed for micro-structural gas sensor. The simulation results of ANSYS reveal that higher temperature and more uniform temperature distribution was achieved in the micro-hotplate when the thickness of SiO2, thickness of Si substrate, electrode width and electrode space were designed to be 100, 200, 20 and 230 mu m, respectively. The new micro-hotplate is benefit for the improvement of sensor sensitivity.

引用

页码：2317 / +

页数：3

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