CMOS compatible micro-oven heater for efficient thermal control of silicon photonic devices

被引：13

作者：

Cao, Liang ^{[1
]}

Aboketaf, Abdelsalam A. ^{[1
]}

Preble, Stefan F. ^{[1
]}

机构：

[1] Rochester Inst Technol, Kate Gleason Coll Engn, Rochester, NY 14623 USA

来源：

OPTICS COMMUNICATIONS | 2013年 / 305卷

基金：

美国国家科学基金会;

关键词：

Silicon photonics; Thermo optic; Electro-optical modulator; Heater;

D O I：

10.1016/j.optcom.2013.05.003

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a heater design for efficient thermo-optic control of silicon photonic devices. The oven-shaped heater is simply realized by using metal contacts/via's in a standard CMOS process. We found both theoretically and experimentally that the micro-oven doubles the heating efficiency over traditional metal strip heaters. Compared to existing high efficiency heater designs, the oven heater is more robust and most importantly it can be easily integrated into electro-optic modulator devices. (C) 2013 Elsevier B.V. All rights reserved.

引用

页码：66 / 70

页数：5

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