Surface modification of titanium using He plasma

被引：44

作者：

Kajita, Shin ^{[1
]}

Kitaoka, Daiki ^{[2
]}

Ohno, Noriyasu ^{[2
]}

Yoshihara, Reiko ^{[3
]}

Yoshida, Naoaki ^{[3
]}

Yoshida, Tomoko ^{[1
]}

机构：

[1] Nagoya Univ, EcoTopia Sci Inst, Nagoya, Aichi 4648603, Japan

[2] Nagoya Univ, Grad Sch Engn, Nagoya, Aichi 4648603, Japan

[3] Kyushu Univ, Appl Mech Res Inst, Kasuga, Fukuoka 8168580, Japan

来源：

APPLIED SURFACE SCIENCE | 2014年 / 303卷

基金：

日本学术振兴会;

关键词：

Nanostructure; Titanium; Helium plasma; Plasma surface modification; IMMERSION ION-IMPLANTATION; BIOMEDICAL APPLICATIONS; METAL-SURFACES; HELIUM; GROWTH; BOMBARDMENT;

D O I：

10.1016/j.apsusc.2014.03.022

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

Helium plasma irradiation to metals could be a potential novel surface modification method in nanoscale. In this study, systematic helium plasma irradiations to titanium were conducted in low ion energy (< 100 eV) and high fluence (> 10(25)m(-2)) regime. From the surface analysis by scanning electron microscopy and transmission electron microscopy, various types of morphology changes, i.e. nanocone, pinhole, porous structure, and rough surfaces, were identified. The experimental conditions that control the various morphology changes are revealed from the aspect of the incident ion energy and the surface temperature. Based on the observations, it is thought that helium bubble growth, surface diffusion, and physical sputtering played important roles for the morphology change. (C) 2014 Elsevier B. V. All rights reserved.

引用

页码：438 / 445

页数：8

共 30 条

[1] Peculiarities and mechanism of the cone growth under ion bombardment
Begrambekov, LB
Zakharov, AM
Telkovsky, VG
[J]. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 1996, 115 (1-4) : 456 - 460
[2] Efficient Plasma Route to Nanostructure Materials: Case Study on the Use of m-WO3 for Solar Water Splitting
de Respinis, Moreno
De Temmerman, Gregory
Tanyeli, Irem
van de Sanden, Mauritius C. M.
Doerner, Russ P.
Baldwin, Matthew J.
van de Krol, Roel
[J]. ACS APPLIED MATERIALS & INTERFACES, 2013, 5 (15) : 7621 - 7625
[3] An equilibrium model for tungsten fuzz in an eroding plasma environment
Doerner, R. P.
Baldwin, M. J.
Stangeby, P. C.
[J]. NUCLEAR FUSION, 2011, 51 (04)
[4] Eckstein Wolfgang., 2002, Calculated sputtering, reflection and range values
[5] Breakaway bubble growth during the annealing of helium bubbles in metals
Evans, JH
[J]. JOURNAL OF NUCLEAR MATERIALS, 2004, 334 (01) : 40 - 46
[6] FUJISHIMA A, 1972, NATURE, V238, P5358
[7] Size- and support-dependency in the catalysis of gold
Haruta, M
[J]. CATALYSIS TODAY, 1997, 36 (01) : 153 - 166
[8] Development of alternative photocatalysts to TiO2: Challenges and opportunities
Hernandez-Alonso, Maria D.
Fresno, Fernando
Suarez, Silvia
Coronado, Juan M.
[J]. ENERGY & ENVIRONMENTAL SCIENCE, 2009, 2 (12) : 1231 - 1257
[9] Oxygen and hydrogen profiles in metal surfaces following plasma immersion ion implantation of helium
Johnson, PB
Gilberd, PW
Markwitz, A
Trompetter, WJ
Collins, GA
Short, KT
Cohen, DD
Dytlewski, N
[J]. SURFACE & COATINGS TECHNOLOGY, 2001, 136 (1-3) : 217 - 222
[10] Helium plasma implantation on metals: Nanostructure formation and visible-light photocatalytic response
Kajita, Shin
Yoshida, Tomoko
Kitaoka, Daiki
Etoh, Reo
Yajima, Miyuki
Ohno, Noriyasu
Yoshida, Hisao
Yoshida, Naoaki
Terao, Yoshitaka
[J]. JOURNAL OF APPLIED PHYSICS, 2013, 113 (13)

← 1 2 3 →