Laser Doppler distance sensor using phase evaluation

被引：27

作者：

Guenther, P. ^{[1
]}

Pfister, T. ^{[1
]}

Buettner, L. ^{[1
]}

Czarske, J. ^{[1
]}

机构：

[1] Tech Univ Dresden, Dept Elect Engn & Informat Technol, Lab Measurement & Testing Tech, Dresden, Germany

来源：

OPTICS EXPRESS | 2009年 / 17卷 / 04期

关键词：

PROFILE SENSOR; TIP-CLEARANCE; VELOCITY;

D O I：

10.1364/OE.17.002611

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper presents a novel optical sensor which allows simultaneous measurements of axial position and tangential velocity of moving solid state objects. An extended laser Doppler velocimeter setup is used with two slightly tilted interference fringe systems. The distance to a solid state surface can be determined via a phase evaluation. The phase laser Doppler distance sensor offers a distance resolution of 150 nm and a total position uncertainty below 1 mu m. Compared to conventional measurement techniques, such as triangulation, the distance resolution is independent of the lateral surface velocity. This advantage enables precise distance and shape measurements of fast rotating surfaces. (C) 2009 Optical Society of America

引用

页码：2611 / 2622

页数：12

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