CO2/H2O gas sensor with a Fabry-Perot filter

被引：0
|
作者：
Noro, M [1 ]
Suzuki, K [1 ]
Kishi, N [1 ]
Hara, H [1 ]
Watanabe, T [1 ]
Iwaoka, H [1 ]
机构：
[1] Yokogawa Elect Corp, Nagano 3994394, Japan
来源：
2002 IEEE/LEOS INTERNATIONAL CONFERENCE ON OPTICAL MEMS, CONFERENCE DIGEST | 2002年
关键词：
Fabry-Perot filter; NDIR; gas sensor;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
An electrostatically driven tunable MEMS Fabry-Perot Filter with wide wavelength range from 2.5 mum to 4.5 mum in has been developed for NDIR CO2/H2O gas sensors. The-Fabry-Perot Filter is equipped with the NDIR system, and the principle of this gas sensing method has been confirmed.
引用
收藏
页码：27 / 28
页数：2
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