Analysis and Simulation of Shunt Capacitive RF MEMS Switch

被引：0
|
作者：
Zhen, Ke-long [1 ]
Tang, Yun-fei [2 ]
机构：
[1] CETC, Res Inst 54, Shijiazhuang, Peoples R China
[2] Jizhou Vocat Educ Ctr, Jizhou, Peoples R China
来源：
INTERNATIONAL CONFERENCE ON COMPUTER, NETWORK SECURITY AND COMMUNICATION ENGINEERING (CNSCE 2014) | 2014年
基金：
国家高技术研究发展计划(863计划);
关键词：
RF MEMS; MMIC; Switch; Insertion loss;
D O I：
暂无
中图分类号：
TP3 [计算技术、计算机技术];
学科分类号：
0812 ;
摘要：
Radio frequency micro-electromechanical system (RF MEMS) switch has attracted more and more attention for its excellent performance. On the basis of analyzing the principle of Shunt Capacitive RF MEMS Switch, this paper studies the effect of equivalent circuit parameters and structure parameters on the microwave characteristics of the MEMS switch respectively. The study will be useful for RF MEMS Switch design and fabrication.
引用
收藏
页码：745 / 749
页数：5
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