Assembly and characterization of optical MEMS (Micro-Electro-Mechanical Systems)

被引：0

作者：

Khalil, D ^{[1
]}

Morshed, AH ^{[1
]}

机构：

[1] Ain Shams Univ, Fac Elect Engn, Cairo, Egypt

来源：

THIRD WORKSHOP ON PHOTONICS AND ITS APPLICATION AT EGYPTIAN ENGINEERING FACULTIES & INSTITUTES | 2002年

关键词：

D O I：

10.1109/PAIA.2002.995083

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

In this work we present a locally developed MEMS-based technology for the assembly and characterization of optical MEMS components. For the assembly purpose, the processes required for the Si and glass micromachineing (oxidation, photolithography and wet etching) are developed in the Laser lab at the faculty of Engineering, Ain Shams University. For the characterization purpose, an automated set-up for the spot size and mis-alignement losses measurements are developed. Both tasks have been fulfilled with a high scientific and engineering level through a B. Sc. project.

引用

页码：111 / 116

页数：6

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