HIGH-SPEED SERIAL-KINEMATIC SPM SCANNER: DESIGN AND DRIVE CONSIDERATIONS

被引：99
作者：
Leang, Kam K. [1 ]
Fleming, Andrew J. [2 ]
机构：
[1] Univ Nevada, Dept Mech Engn, Reno, NV 89557 USA
[2] Univ Newcastle, Sch Elect Engn & Comp Sci, Callaghan, NSW 2308, Australia
来源：
ASIAN JOURNAL OF CONTROL | 2009年 / 11卷 / 02期
基金：
美国国家科学基金会; 澳大利亚研究理事会;
关键词：
High-speed nanopositioning; piezoactuator; scanning probe microscope; ATOMIC-FORCE MICROSCOPY; VIBRATION COMPENSATION; HYSTERESIS; CREEP;
D O I：
10.1002/asjc.90
中图分类号：
TP [自动化技术、计算机技术];
学科分类号：
0812 ;
摘要：
This paper describes the design of a flexure-guided, two-axis nanopositioner (scanner) driven by piezoelectric stack actuators. The scanner is specifically designed for high-speed scanning probe microscopy (SPM) applications, such as atomic force microscopy (AFM). A high-speed AFM scanner is an essential component for acquiring high-resolution, three-dimensional, time-lapse images of fast processes such as the rapid movement of cells and the diffusion of DNA molecules. A two-axis SPM scanner is proposed, where the slow and fast scanning axes are serially connected and flexure guided to minimize runout. The scanner's achievable scan range is approximately 10 mu m x 10 mu m. Finite element analysis is utilized to optimize the mechanical resonance frequencies of the scanner. Experimental results show a first major resonance in the slow and fast axis at 1.5 and 29 kHz, respectively. This paper also discusses the various tradeoffs between speed, range, electrical requirements, and scan trajectory design for high-speed nanopositioning
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收藏
页码：144 / 153
页数：10
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