Optical Tailoring of RF Magnetron Sputtered ZnO Thin Films

被引：3

作者：

Hassan, A. ^{[1
]}

Feng, C. ^{[1
]}

Riaz, S. ^{[2
]}

Naseem, S. ^{[2
]}

Jiang, Y. ^{[1
]}

机构：

[1] Beijing Univ Technol, Inst Laser Engn, Beijing 100124, Peoples R China

[2] Univ Punjab, Ctr Excellence Solid State Phys, Lahore 54590, Pakistan

来源：

33RD INTERNATIONAL CONFERENCE ON THE PHYSICS OF SEMICONDUCTORS | 2017年 / 864卷

关键词：

TCO; ZnO; RF magnetron sputtering; spectroscopic ellipsometer; optoelectronic; ELECTRICAL-PROPERTIES; GROWTH; OXIDE; AG;

D O I：

10.1088/1742-6596/864/1/012014

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Pure and N-2 doped ZnO thin films of thickness ranging similar to 300-500nm with 5,10,15,20,25, and 50 sccm inflow ratios of N-2 are deposited on soda-lime glass by means of RF magnetron sputtering system, and observed the dependence of optical properties of ZnO by the function of doping with the help of spectroscopic ellipsometer. And found that the N-2-inflow highly affects the optical properties of ZnO thin films. Even the high transmittance of about 97% is achieved and absorbance graph also shows that slight variation in N-2 inflow affects the absorbance, which is maximum with in UV region. Optical conductivity of ZnO is also observed high with the increase of N-2 inflow. With 25sccm N-2 inflow conductivity rose to the maximum value of about 1.4 x 10(7) Omega(-1)cm(-1), with 15sccm inflow of N-2 conductivity value is 2.0 x 10(6) Omega(-1)cm(-1) in the visible region. This is a strong contribution towards next generation photovoltaic devices.

引用

页数：4

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