Design & simulation of a CMOS MEMS using standard microelectronic CAD environment

被引：0

作者：

Latorre, L ^{[1
]}

Beroulle, V ^{[1
]}

Nouet, P ^{[1
]}

机构：

[1] Lab Informat Robot & Microelect Montpellier, F-34392 Montpellier 5, France

来源：

NANOTECH 2003, VOL 2 | 2003年

关键词：

CMOS MEMS; mechanical filtering; spectral analysis; Spectre-RF (R);

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper addresses the design of CMOS monolithic microsystems through a case study. An increasing interest is given to such devices, which are intended to address large volume markets where batch fabrication is the only solution. This work demonstrates the efficiency of standard microelectronic CAD tools for MEMS design and simulation. The proposed design example is based on the super-heterodyne spectrum analyzer using a mechanical structure to achieve the high-Q filtering.

引用

页码：472 / 475

页数：4