Development of a two-DOF inertial rotary motor using a piezoelectric actuator constructed on four bimorphs

被引：50
作者：
Zhang, Shijing [1 ]
Liu, Yingxiang [1 ]
Deng, Jie [1 ]
Tian, Xinqi [1 ]
Gao, Xiang [1 ]
机构：
[1] Harbin Inst Technol, State Key Lab Robot & Syst, Harbin 150001, Heilongjiang, Peoples R China
来源：
MECHANICAL SYSTEMS AND SIGNAL PROCESSING | 2021年 / 149卷
基金：
中国国家自然科学基金;
关键词：
Piezoelectric motor; Inertial drive; Two-degree of freedom; Piezoelectric actuator; Bimorph; DESIGN; DRIVEN; SYSTEM;
D O I：
10.1016/j.ymssp.2020.107213
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
A new two-DOF inertial rotary motor using a two-dimensional piezoelectric actuator (PEA) constructed on four bimorphs was developed in this work. The theoretical analyses and finite element method (FEM) simulation were accomplished to design the twodimensional PEA. The stick-slip mechanism was utilized to implement the rotary motions of the motor. Then the mechanical output performances of the motor were tested and compared with previous work. The experimental results indicated that the maximum rotary velocities of the motor were 263.26 mrad/s around X axis and 268.48 mrad/s around Y axis under voltage of 210 Vp-p and frequency of 630 Hz, respectively. The angular displacement resolutions of 6.27 mu rad around X axis and 6.34 mu rad around Y axis were achieved under voltage increment of 2.5 V, respectively. This new motor held the advantages of smaller size and larger output speed. This motor could be applied to precision attitude adjustment systems by virtue of its compact size, high resolution and large rotary motion space. (C) 2020 Elsevier Ltd. All rights reserved.
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页数：15
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