Design and control of a novel piezo-driven XY parallel nanopositioning stage

被引：34
|
作者：
Zhang, Xiaozhi [1 ]
Zhang, Yulong [1 ]
Xu, Qingsong [1 ]
机构：
[1] Univ Macau, Fac Sci & Technol, Dept Electromech Engn, Ave Univ, Taipa, Macau, Peoples R China
来源：
MICROSYSTEM TECHNOLOGIES-MICRO-AND NANOSYSTEMS-INFORMATION STORAGE AND PROCESSING SYSTEMS | 2017年 / 23卷 / 04期
关键词：
SLIDING-MODE CONTROL; DISPLACEMENT AMPLIFICATION RATIO; FLEXURE; MECHANISM;
D O I：
10.1007/s00542-016-2854-y
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
This paper presents the mechanism and control design of a modular XY nanopositioning stage employing flexure mechanisms and piezoelectric actuators. A new compact parallel flexure stage with two translational degrees-of-freedom is presented. The dual-stacked bridge-type amplifier is employed by a serial connection of two amplifiers. Static and dynamic analytical modeling of the XY stage are carried out, which are verified by performing finite element analysis simulations. Owing to a larger amplification ratio of the bridge-type amplifier and acceptable decoupling property, the stage exhibits a nearly decoupled two-dimensional large motion. Moreover, the adaptive discrete sliding mode control scheme is devised to achieve precise positioning for the stage. The performance and effectiveness of this presented design are verified by several experimental studies.
引用
收藏
页码：1067 / 1080
页数：14
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