A 200μW Eddy Current Displacement Sensor with 6.7nmRMS Resolution

被引：0

作者：

Pimenta, Matheus ^{[1
,2
]}

Gurleyuk, Cagri ^{[1
]}

Walsh, Paul ^{[2
]}

O'Keeffe, Daniel ^{[2
]}

Babaie, Masoud ^{[1
]}

Makinwa, Kofi ^{[1
]}

机构：

[1] Delft Univ Technol, Delft, Netherlands

[2] Cypress Semicond Inc, Cork, Ireland

来源：

2020 IEEE SYMPOSIUM ON VLSI CIRCUITS | 2020年

关键词：

D O I：

暂无

中图分类号：

TP3 [计算技术、计算机技术];

学科分类号：

0812 ;

摘要：

This paper describes a low-power eddy current displacement sensor intended for safety-critical touch applications. A sensing inductor is incorporated into a digital PLL to efficiently digitize the displacement of a flexible metal foil. At a stand-off distance of 500 mu m, the sensor achieves 6.7nm resolution in a 3kHz bandwidth over a 43 mu m range. It consumes 200 mu W from a 1.8V supply, which represents a 35x improvement on the state of the art.

引用

页数：2

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