The role of charge trapping in MoS2/SiO2 and MoS2/hBN field-effect transistors

被引:224
作者
Illarionov, Yury Yu [1 ,2 ]
Rzepa, Gerhard [1 ]
Waltl, Michael [1 ]
Knobloch, Theresia [1 ]
Grill, Alexander [1 ]
Furchi, Marco M. [3 ]
Mueller, Thomas [3 ]
Grasser, Tibor [1 ]
机构
[1] TU Wien, Inst Microelect, Gusshausstr 27-29, A-1040 Vienna, Austria
[2] Ioffe Phys Tech Inst, Polytech Skaya 26, St Petersburg 194021, Russia
[3] TU Wien, Inst Photon, Gusshausstr 27-29, A-1040 Vienna, Austria
基金
奥地利科学基金会;
关键词
molybdenum disulfide; transistor; hysteresis; fast and slow traps; bias-temperature instabilities; hBN; SiO2; BIAS TEMPERATURE INSTABILITY; INTEGRATED-CIRCUITS; HYSTERESIS; MECHANISMS; GRAPHENE;
D O I
10.1088/2053-1583/3/3/035004
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
The commonly observed hysteresis in the transfer characteristics of MoS2 transistors is typically associated with charge traps in the gate insulator. Since in Si technologies such traps can lead to severe reliability issues, we perform a combined study of both the hysteresis as well as the arguably most important reliability issue, the bias-temperature instability. We use single-layer MoS2 FETs with SiO2 and hBN insulators and demonstrate that both phenomena are indeed due to traps in the gate insulator with time constants distributed over wide timescales, where the faster ones lead to hysteresis and the slower ones to bias-temperature instabilities. Our data show that the use of hBN as a gate insulator considerably reduces the number of accessible slow traps and thus improves the reliability. However, the reliability of hBN insulators deteriorates with increasing temperature due to the thermally activated nature of charge trapping.
引用
收藏
页数:10
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