An Eight-Zonal Piezoelectric Tube-Type Threaded Ultrasonic Motor Based on Second-Order Bending Mode
被引:11
作者:
Chu, Xiangcheng
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Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Chu, Xiangcheng
[1
]
Zhang, Mengfan
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Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Zhang, Mengfan
[1
]
Yuan, Songmei
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机构:
Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Yuan, Songmei
[2
]
Zheng, Xueyang
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Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Zheng, Xueyang
[2
]
机构:
[1] Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
[2] Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, Peoples R China
In order to reduce the driving voltage and gain better output characteristics of piezoelectric actuators, an eight-zonal piezoelectric tube-type threaded ultrasonic motor based on two second-order bending modes was analyzed using the method of finite element analysis (FEA), and a prototype was fabricated and experimentally studied in this research. This piezoelectric motor was designed to be excited by four electrical sources applied simultaneously to four groups of electrodes on the customized lead zirconate titanate (PZT) tubular stator (inside diameter 5.35 mm, outside diameter 6.35 mm, length 30 mm), with +/- 90 degrees phase shifts between adjacent electrodes. Experimental results show that the threaded motor could output a stall force (stall force means the output pull or thrust force when the linear speed is set to be zero) of about 5.0 N and a linear velocity of 4.9 mm/s with no load at the driving voltage of 40 V-pp (V-pp means the peak-to-peak value of the voltage volts). This piezoelectric motor with a compact structure and screw drive mechanism shows relatively fine velocity controllability and has huge superiority in micro-positioning systems.
机构:
Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Chu, Xiangcheng
;
Wang, Jiawei
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Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Wang, Jiawei
;
Yuan, Songmei
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机构:
Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Yuan, Songmei
;
Li, Longtu
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机构:
Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Li, Longtu
;
Cui, Hongchao
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机构:
Paihe Sci & Technol Holding Co Ltd, Beijing 100083, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
机构:
Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USAPenn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Dong, SX
;
Lim, SP
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机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Lim, SP
;
Lee, KH
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机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Lee, KH
;
Zhang, JD
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机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Zhang, JD
;
Lim, LC
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机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Lim, LC
;
Uchino, K
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机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
机构:
Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Chu, Xiangcheng
;
Wang, Jiawei
论文数: 0引用数: 0
h-index: 0
机构:
Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Wang, Jiawei
;
Yuan, Songmei
论文数: 0引用数: 0
h-index: 0
机构:
Beihang Univ, Sch Mech Engn & Automat, Beijing 100191, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Yuan, Songmei
;
Li, Longtu
论文数: 0引用数: 0
h-index: 0
机构:
Tsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
Li, Longtu
;
Cui, Hongchao
论文数: 0引用数: 0
h-index: 0
机构:
Paihe Sci & Technol Holding Co Ltd, Beijing 100083, Peoples R ChinaTsinghua Univ, Sch Mat Sci & Engn, State Key Lab New Ceram & Fine Proc, Beijing 100084, Peoples R China
机构:
Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USAPenn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Dong, SX
;
Lim, SP
论文数: 0引用数: 0
h-index: 0
机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Lim, SP
;
Lee, KH
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h-index: 0
机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Lee, KH
;
Zhang, JD
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h-index: 0
机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Zhang, JD
;
Lim, LC
论文数: 0引用数: 0
h-index: 0
机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA
Lim, LC
;
Uchino, K
论文数: 0引用数: 0
h-index: 0
机构:Penn State Univ, Int Ctr Transducers & Actuators, Inst Mat Res, University Pk, PA 16802 USA