High quality transparent TiO2/Ag/TiO2 composite electrode films deposited on flexible substrate at room temperature by sputtering

被引：99

作者：

Dhar, Aritra ^{[1
]}

Alford, T. L. ^{[1
,2
]}

机构：

[1] Arizona State Univ, Dept Chem & Biochem, Tempe, AZ 85287 USA

[2] Arizona State Univ, Sch Engn Matter Transport & Energy, Tempe, AZ 85287 USA

来源：

APL MATERIALS | 2013年 / 1卷 / 01期

基金：

美国国家科学基金会;

关键词：

CONDUCTORS;

D O I：

10.1063/1.4808438

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Multilayer structures of TiO2/Ag/TiO2 have been deposited onto flexible substrates by room temperature sputtering to develop indium-free transparent composite electrodes. The effect of Ag thicknesses on optical and electrical properties and the mechanism of conduction have been discussed. The critical thickness (t(c)) of Ag mid-layer to form a continuous conducting layer is 9.5 nm and the multilayer has been optimized to obtain a sheet resistance of 5.7 Omega/sq and an average optical transmittance of 90% at 590 nm. The Haacke figure of merit (FOM) for t(c) has one of the highest FOMs with 61.4 x 10(-3) Omega(-1)/sq. (C) 2013 Author(s).

引用

页数：7

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