MEMS AT BOSCH - INVENTED FOR LIFE

被引：0

作者：

Laermer, Franz ^{[1
]}

机构：

[1] Robert Bosch GmbH, Corp Sect Res & Adv Engn Microsyst & Microfluid, Robert Bosch Campus 1, DE-71272 Renningen, Germany

来源：

2018 IEEE MICRO ELECTRO MECHANICAL SYSTEMS (MEMS) | 2018年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

MEMS is an enabling technology for many new sensors which made their way into automotive, consumer, Internet-of-things and Industry4.0 applications. Their success story is based on miniaturization, high accuracy, reliability, low manufacturing costs and scalability to high production volumes yielding significant economy of scales effects. Today chip- and device-level technology has matured. MEMS innovation happens mainly on the system and product level which represents a move up in the value chain. Technology innovation can be found in new domains away from classical silicon MEMS sensors, like microfluidic solutions for diagnostics at the point of care.

引用

页码：237 / 240

页数：4