Growth of 3-inch langasite single crystal and its application to substrate for surface acoustic wave filters

被引：38

作者：

Uda, S ^{[1
]}

Bungo, A ^{[1
]}

Jian, C ^{[1
]}

机构：

[1] Mitsubishi Mat Co Ltd, Elect Technol Res Ctr, Chichibu, Saitama 3688503, Japan

来源：

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 1999年 / 38卷 / 9B期

关键词：

langasite; soaking; interface; cluster; supercooling; facet; SAW filter;

D O I：

10.1143/JJAP.38.5516

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Macro defect-free langasite (La3Ga5SiO14) of 3" diameter was grown by the Czochralski technique. Thermal treatment of the melt and a uniform interface shape are important for langasite growth with a clear habit of faceting. The homogeneity in composition was two-dimensionally investigated by X-ray diffraction analysis and SAW (surface acoustic wave) velocity distribution on the wafer fabricated from the crystal. The deviation was sufficiently small for the use of langasite as a suitable substrate in SAW device applications. SAW properties were calculated based on the available material constants.

引用

页码：5516 / 5519

页数：4

共 11 条

[1] MEASUREMENT OF DENSITY, VISCOSITY AND SURFACE-TENSION OF MOLTEN LITHIUM-NIOBATE [J].

ANZAI, Y ;

KIMURA, S ;

SAWADA, T ;

RUDOLPH, T ;

SHIGEMATSU, K .

JOURNAL OF CRYSTAL GROWTH, 1993, 134 (3-4) :227-234

[2] PHYSICAL-PROPERTIES OF MOLTEN LITHIUM TETRABORATE [J].

ANZAI, Y ;

TERASHIMA, K ;

KIMURA, S .

JOURNAL OF CRYSTAL GROWTH, 1993, 134 (3-4) :235-239

[3]

BUAZANOV OA, 1996, P IEEE FREQ S, P131

[4] Analysis of surface acoustic wave properties of the rotated Y-cut langasite substrate [J].

Bungo, A ;

Jian, CY ;

Yamaguchi, K ;

Sawada, Y ;

Uda, S ;

Pisarevsky, YP .

JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 1999, 38 (5B) :3239-3243

[5]

BUNGO A, 1998, P 27 EM S, P125

[6] A METHOD FOR ESTIMATING OPTIMAL CRYSTAL CUTS AND PROPAGATION DIRECTIONS FOR EXCITATION OF PIEZOELECTRIC SURFACE WAVES [J].

CAMPBELL, JJ ;

JONES, WR .

IEEE TRANSACTIONS ON SONICS AND ULTRASONICS, 1968, SU15 (04) :209-+

[7]

GOTALSKAYA AN, 1993, P IEEE FREQ S, V47, P339

[8] P-N JUNCTIONS PRODUCED BY GROWTH RATE VARIATION [J].

HALL, RN .

PHYSICAL REVIEW, 1952, 88 (01) :139-139

[9] Growth and characterization of lanthanum gallium silicate La3Ga5SiO14 single crystals for piezoelectric applications [J].

Shimamura, K ;

Takeda, H ;

Kohno, T ;

Fukuda, T .

JOURNAL OF CRYSTAL GROWTH, 1996, 163 (04) :388-392

[10] INFLUENCE OF UNIT CLUSTER-SIZE ON NUCLEATION RATE OF LI2B4O7 MELT [J].

UDA, S .

JOURNAL OF CRYSTAL GROWTH, 1994, 140 (1-2) :128-138

← 1 2 →