A two-stage surface treatment for the long-term stability of hydrophilic SU-8

被引:10
作者
Sobiesierski, Angela [1 ]
Thomas, Robert [1 ]
Buckle, Philip [1 ]
Barrow, David [2 ]
Smowton, Peter M. [1 ]
机构
[1] Cardiff Univ, Sch Phys & Astron, Cardiff CF24 3AA, S Glam, Wales
[2] Cardiff Univ, Sch Engn, Cardiff CF24 3AA, S Glam, Wales
基金
英国工程与自然科学研究理事会;
关键词
SU-8; hydrophilic surface; contact angle; XPS; OXYGEN PLASMA; MEMS; BIOCOMPATIBILITY; PHOTORESIST; FABRICATION;
D O I
10.1002/sia.5870
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
The use of SU-8 photoresist as a structuring material for portable capillary-flow cytometry devices has been restricted by the near-hydrophobic nature of the SU-8 surface. In this work, we evaluate the use of chemical and plasma treatments to render the SU-8 surface hydrophilic and characterise the resulting surface utilising a combination of techniques including contact angle goniometry, atomic force microscopy and X-ray photoelectron spectroscopy. In particular, for low-power plasma treatments, we find that the chemistry of the plasma used to modify the SU-8 surface and the incorporation of O-2 on that modified surface are paramount for improved surface wettability, whilst plasma-induced surface roughness is not a necessary requirement. We demonstrate a technique to obtain a hydrophilic SU-8 surface with contact angle as low as 7 degrees whilst controlling and significantly reducing the level of surface roughness generated via the applied plasma. An additional chemical treatment step is found to be essential to stabilise the activated SU-8 surface, and incubation of the samples with ethanolamine is demonstrated as an effective second-stage treatment. Application of the optimised two-stage surface treatment to cross-linked SU-8 is shown to result in a smooth hydrophilic surface that remains stable for over 3 months. Copyright (C) 2015 The Authors Surface and Interface Analysis Published by John Wiley & Sons Ltd.
引用
收藏
页码:1174 / 1179
页数:6
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