Precision laser processing of optical microstructures with slab waveguide CO2 lasers

被引：6

作者：

Baker, HJ ^{[1
]}

Markillie, GAJ ^{[1
]}

Field, P ^{[1
]}

Cao, QS ^{[1
]}

Janke, C ^{[1
]}

Hall, DR ^{[1
]}

机构：

[1] Heriot Watt Univ, Dept Phys, Edinburgh EH14 4AS, Midlothian, Scotland

来源：

HIGH-POWER LASERS IN MANUFACTURING | 2000年 / 3888卷

关键词：

laser micro-machining; slab waveguide laser; micro-optics; micro-structures; photonic bandgap device;

D O I：

10.1117/12.377073

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

High precision laser direct writing of two types of micro-optical structure is demonstrated using a workstation built around a commercial CO2 slab waveguide laser. Drift and fluctuations in beam pointing, beam shape and pulse energy are quantified, providing an understanding of the precision capabilities. Quartz glass ablation by waveguide laser pulses of width in the 20 to 60 mu s range has been characterised and a refractive microlens machined, involving material removal to a depth of 70 mu m. Surface structures in aluminum with 143 mu m lattice spacing have been produced to act as two dimensional photonic bandgap devices, modifying the transmission properties of hollow planar waveguides in the mid-infrared.

引用

页码：625 / 634

页数：10

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