Electron plasma parameters and ion energy measurement at the grounded electrode in an rf discharge

Investigations on the electron plasma parameters and ion energy distributions (IEDs) at the grounded electrode (anode) of an asymmetrical capacitively coupled rf discharge in argon are presented. These are compared with studies from previous papers related to the sheath formed in front of the powered electrode. The I-V characteristics provided by a self-compensated Langmuir probe show the existence of a bi-Maxwellian distribution with a bulk cold election group and a hot electron group. From mass spectrometric investigations, the IEDs exhibit a double peak shape. The theoretical model for transport of the ions and electrons in the sheath of a capacitively coupled, asymmetric rf discharge was considered. Combination of two effects, the rf modulation of the sheath potential and charge exchange as a dominant inelastic interaction process in the sheath, leads to pronounced and characteristic additional structures in the IEDs.