Plasmonic behaviors of metallic AZO thin film and AZO nanodisk array

被引：19
作者：
Lin, Jia-Yu
Zhong, Kun-Da
Lee, Po-Tsung [1 ]
机构：
[1] Natl Chiao Tung Univ, Dept Photon, Room 401,CPT Bldg,1001 Ta Hsueh Rd, Hsinchu 300, Taiwan
来源：
OPTICS EXPRESS | 2016年 / 24卷 / 05期
关键词：
OPTICAL-CONSTANTS; ZNO FILMS; WAVE-GUIDES; PHOTOLUMINESCENCE; WAVELENGTHS; OXIDATION;
D O I：
10.1364/OE.24.005125
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
Aluminum-doped zinc oxide (AZO) is well known as transparent conducting material for electro-optical devices, but is rarely used as plasmonic material, particularly on the localized surface plasmon resonance (LSPR) behavior of AZO nanostructure and its plasmonic devices. In this study, we systematically investigate the plasmonic behaviors of AZO thin films and patterned AZO nanostructures with various structural dimensions under different annealing treatments. We find that AZO film can possess highly-tunable, metal-like, and low-loss plasmonic property and the LSPR characteristic of AZO nanostructure is observed in the near-infrared (NIR) region under proper annealing conditions. Finally, environmental index sensing is performed to demonstrate the capability of AZO nanostructure for optical sensing application. High index sensitivity of 873 nm per refractive index unit (RIU) variation is obtained in experiment. (C) 2016 Optical Society of America
引用
收藏
页码：5125 / 5135
页数：11
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