Micromachined PMN-PT Single Crystal Composite Transducers-15-75 MHz PC-MUT

被引：27

作者：

Jiang, X. ^{[1
]}

Snook, K. ^{[1
]}

Cheng, A. ^{[2
]}

Hackenberger, W. S. ^{[1
]}

Geng, X. ^{[3
]}

机构：

[1] TRS Technol Inc, State Coll, PA 16801 USA

[2] Penn State Univ, University Pk, PA 16803 USA

[3] Blatek Inc, State Coll, PA USA

来源：

2008 IEEE ULTRASONICS SYMPOSIUM, VOLS 1-4 AND APPENDIX | 2008年

关键词：

piezoelectric composite; PC-MUT; PMN-PT single crystal; 1-3; composite; ultrasound transducer; micromachining of piezoelectrics;

D O I：

10.1109/ULTSYM.2008.0040

中图分类号：

O42 [声学];

学科分类号：

070206 ; 082403 ;

摘要：

In this paper a piezoelectric composite based micromachined ultrasound transducer (PC-MUT) technology is presented for fabrication of PMN-PT single crystal piezoelectric composite transducers. Micromachined PMN-PT single crystal 1-3 composites with resonance frequencies of 15 MHz - 75 MHz were fabricated and characterized with coupling coefficient of 0.67 - 0.79. Transducers with a frequency of 75 MHz were prototyped and characterized.

引用

页码：164 / +

页数：2