Ferroelectric thin films in microelectromechanical systems applications

被引：270
作者：
Polla, DL
Francis, LF
机构：
[1] UNIV MINNESOTA, SCH MED, MINNEAPOLIS, MN 55455 USA
[2] UNIV MINNESOTA, MICROTECHNOL LAB, MINNEAPOLIS, MN 55455 USA
[3] UNIV MINNESOTA, DEPT CHEM ENGN & MAT SCI, MINNEAPOLIS, MN 55455 USA
来源：
MRS BULLETIN | 1996年 / 21卷 / 07期
关键词：
D O I：
10.1557/S0883769400035934
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：59 / 65
页数：7
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