Ferroelectric thin films in microelectromechanical systems applications

被引：269
|
作者：
Polla, DL
Francis, LF
机构：
[1] UNIV MINNESOTA, SCH MED, MINNEAPOLIS, MN 55455 USA
[2] UNIV MINNESOTA, MICROTECHNOL LAB, MINNEAPOLIS, MN 55455 USA
[3] UNIV MINNESOTA, DEPT CHEM ENGN & MAT SCI, MINNEAPOLIS, MN 55455 USA
来源：
MRS BULLETIN | 1996年 / 21卷 / 07期
关键词：
D O I：
10.1557/S0883769400035934
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：59 / 65
页数：7
相关论文
共 50 条
  • [1] Microelectromechanical systems based on ferroelectric thin films
    Polta, DL
    MICROELECTRONIC ENGINEERING, 1995, 29 (1-4) : 51 - 58
  • [2] Ferroelectric and antiferroelectric films for microelectromechanical systems applications
    Xu, BM
    Cross, LE
    Bernstein, JJ
    THIN SOLID FILMS, 2000, 377 : 712 - 718
  • [3] Giant magnetostrictive thin films for applications in microelectromechanical systems (invited)
    Ludwig, A
    Quandt, E
    JOURNAL OF APPLIED PHYSICS, 2000, 87 (09) : 4691 - 4695
  • [4] Investigation of anodic silicon dioxide thin films for microelectromechanical systems applications
    Ashok, Akarapu
    Pal, Prem
    MICRO & NANO LETTERS, 2014, 9 (12): : 830 - 834
  • [5] Ferroelectric thin films and their applications
    Wersing, Wolfram
    Bruchhaus, Rainer
    Proceedings of SPIE - The International Society for Optical Engineering, 1994, 2364 : 12 - 20
  • [6] Application of PZT thin films in microelectromechanical systems
    Polla, DL
    SMART ELECTRONICS AND MEMS - SMART STRUCTURES AND MATERIALS 1997, 1997, 3046 : 24 - 27
  • [7] Permanent magnet films for applications in microelectromechanical systems
    Chin, TS
    JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2000, 209 (1-3) : 75 - 79
  • [8] Piezoelectric aluminum nitride thin films for microelectromechanical systems
    Piazza, Gianluca
    Felmetsger, Valeriy
    Muralt, Paul
    Olsson, Roy H., III
    Ruby, Richard
    MRS BULLETIN, 2012, 37 (11) : 1051 - 1061
  • [9] Ferroelectric thin films for optical applications
    Buchal, C
    Siegert, M
    INTEGRATED FERROELECTRICS, 2001, 35 (1-4) : 1731 - 1740
  • [10] Processing of PZT piezoelectric thin films for microelectromechanical systems
    Hendrickson, M
    Su, T
    TrolierMcKinstry, S
    Rod, BJ
    Zeto, RJ
    ISAF '96 - PROCEEDINGS OF THE TENTH IEEE INTERNATIONAL SYMPOSIUM ON APPLICATIONS OF FERROELECTRICS, VOLS 1 AND 2, 1996, : 683 - 686
12345