Mechanical properties of gradient and multilayered TiAlSiN hard coatings

被引：44

作者：

Chang, Yin-Yu ^{[1
]}

Yang, Shun-Jan ^{[2
]}

Wu, Weite ^{[2
]}

Kuo, Yu-Chu ^{[3
]}

Lee, Jyh-Wei ^{[4
]}

Wang, Chaur-Jeng ^{[3
]}

机构：

[1] Mingdao Univ, Dept Mat Sci & Engn, Pitou 52345, Changhua, Taiwan

[2] Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 402, Taiwan

[3] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei, Taiwan

[4] Tungnan Univ, Dept Mech Engn, Taipei, Taiwan

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 17期

关键词：

Mechanical properties; Hard coating; Physical vapor deposition; Thin films; TI-AL; OXIDATION RESISTANCE; MICROSTRUCTURE; FILMS; STRESS;

D O I：

10.1016/j.tsf.2009.03.036

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Multicomponent coatings based on different metallic and non-metallic elements possess the combined benefit of individual components leading to further improvement of coating properties. In this study, monolayered Ti-Al-N, multilayered Ti-Al-N/TiN, gradient Ti-Al-Si-N, and multilayered Ti-Al-Si-N/TiN coatings were synthesized by using a cathodic-arc evaporation (CAE) system. In addition to Ti, Ti33Al67 and Al88Si12 cathodes were used for the deposition of Ti-Al-N, and Ti-Al-Si-N coatings, respectively. The gradient Ti0.50Al0.43Si0.07N, and multilayered Ti0.50Al0.43Si0.07N/TiN with nanograins separated by disordered grain boundaries possessed lower residual stress (-2.8 similar to - 4.8 GPa) than that of monolayered Ti-Al-N (- 6.8 GPa) and multilayered Ti-Al-N/TiN coatings (- 5.7 GPa). The highest hardness was obtained for the gradient Ti0.50Al0.43Si0.07N (38 +/- 2 GPa) with Ti/(Ti + Al + Si) content ratio being 0.5. On the contrary, the multilayered Ti0.50Al0.43Si0.07N/TiN possessed the highest H-3/E*(2) ratio of 0.182 +/- 0.003 GPa, indicating the best resistance to plastic deformation, among the studied coatings. (c) 2009 Elsevier B.V. All rights reserved.

引用

页码：4934 / 4937

页数：4

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