Mechanical properties of gradient and multilayered TiAlSiN hard coatings

被引:43
作者
Chang, Yin-Yu [1 ]
Yang, Shun-Jan [2 ]
Wu, Weite [2 ]
Kuo, Yu-Chu [3 ]
Lee, Jyh-Wei [4 ]
Wang, Chaur-Jeng [3 ]
机构
[1] Mingdao Univ, Dept Mat Sci & Engn, Pitou 52345, Changhua, Taiwan
[2] Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 402, Taiwan
[3] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei, Taiwan
[4] Tungnan Univ, Dept Mech Engn, Taipei, Taiwan
关键词
Mechanical properties; Hard coating; Physical vapor deposition; Thin films; TI-AL; OXIDATION RESISTANCE; MICROSTRUCTURE; FILMS; STRESS;
D O I
10.1016/j.tsf.2009.03.036
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Multicomponent coatings based on different metallic and non-metallic elements possess the combined benefit of individual components leading to further improvement of coating properties. In this study, monolayered Ti-Al-N, multilayered Ti-Al-N/TiN, gradient Ti-Al-Si-N, and multilayered Ti-Al-Si-N/TiN coatings were synthesized by using a cathodic-arc evaporation (CAE) system. In addition to Ti, Ti33Al67 and Al88Si12 cathodes were used for the deposition of Ti-Al-N, and Ti-Al-Si-N coatings, respectively. The gradient Ti0.50Al0.43Si0.07N, and multilayered Ti0.50Al0.43Si0.07N/TiN with nanograins separated by disordered grain boundaries possessed lower residual stress (-2.8 similar to - 4.8 GPa) than that of monolayered Ti-Al-N (- 6.8 GPa) and multilayered Ti-Al-N/TiN coatings (- 5.7 GPa). The highest hardness was obtained for the gradient Ti0.50Al0.43Si0.07N (38 +/- 2 GPa) with Ti/(Ti + Al + Si) content ratio being 0.5. On the contrary, the multilayered Ti0.50Al0.43Si0.07N/TiN possessed the highest H-3/E*(2) ratio of 0.182 +/- 0.003 GPa, indicating the best resistance to plastic deformation, among the studied coatings. (c) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码:4934 / 4937
页数:4
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