Optical profiler based on the white-light interfering method

被引：0

作者：

Bo, L ^{[1
]}

Jian, Z ^{[1
]}

Wu, LY ^{[1
]}

Qiang, XF ^{[1
]}

Jiang, JF ^{[1
]}

机构：

[1] Harbin Univ Sci & Technol, Harbin 150080, Peoples R China

来源：

PROCEEDINGS OF THE FIRST INTERNATIONAL SYMPOSIUM ON INSTRUMENTATION SCIENCE AND TECHNOLOGY | 1999年

关键词：

3D surface profile; three-frame phase-shift method; interference;

D O I：

暂无

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

An optical profiler based on the white-light interfering method is introduced in this paper. It uses the white-light interfering method and adopts the structure of Micelson interferer. Tt includes the light bulb used as the light resource,CCD used as the sensor, PZT providing microscopic translating and the computer sampling and processing data with high speed. The principle of measurement is to use the while-light phase-shift interfering method. The computing way is three-frame phase-shift method. Then we may bobtail the 3D surface profile of object to be measured.

引用

页码：471 / 475

页数：5