Design and fabrication of superconducting transition edge sensor bolometers with background limited noise performance

被引：9

作者：

Zhang, Qingya ^{[1
,2
]}

Liu, Jianshe ^{[1
,2
]}

Dong, Wenhui ^{[1
,2
]}

Wang, Tianshun ^{[3
,4
]}

He, Genfang ^{[1
,2
]}

Li, Tiefu ^{[1
,2
]}

Zhou, Xingxiang ^{[3
,4
]}

Chen, Wei ^{[1
,2
]}

机构：

[1] Tsinghua Univ, Tsinghua Natl Lab Informat Sci & Technol, Beijing 100084, Peoples R China

[2] Tsinghua Univ, Dept Micro Nanoelect, Inst Microelect, Beijing 100084, Peoples R China

[3] Univ Sci & Technol China, Dept Opt & Opt Engn, Hefei 230026, Peoples R China

[4] Univ Sci & Technol China, CAS Key Lab Quantum Informat, Hefei 230026, Peoples R China

来源：

CHINESE SCIENCE BULLETIN | 2014年 / 59卷 / 19期

基金：

中国国家自然科学基金;

关键词：

Bolometer; Superconducting transition edge sensor; Background limited noise performance; ELECTROTHERMAL FEEDBACK; ARRAYS;

D O I：

10.1007/s11434-014-0338-y

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

We successfully designed and fabricated TES bolometers utilizing Al/Ti bilayer TESs as sensitive thermometers. To reduce the intrinsic noise level and tune the saturation power of a bolometer, the TES thermometer is placed on a suspended SiN platform which is thermally coupled to the heat bath by four long SiN beams with different geometries. The measurement results show that the detectors have background limited noise performance, with a low noise equivalent power (NEP) on the order of 10(-17) W/Hz(1/2) and have a saturation power of several tens pW at a bath temperature of 320 mK. These detectors are suitable for applications in ground-based astrophysics experiments by integrating absorbers for specific wavelengths.

引用

页码：2292 / 2297

页数：6