Effect of passivation layers on characteristics of AlGaInP ridge waveguide laser diodes

被引:7
作者
Hung, Chih-Tsang
Huang, Shen-Che
Lu, Tien-Chang [1 ]
机构
[1] Natl Chiao Tung Univ, Dept Photon, Hsinchu 30010, Taiwan
关键词
AlGaInP; Laser diodes; Dielectric layer; NATIVE-OXIDE;
D O I
10.1016/j.optlastec.2013.12.014
中图分类号
O43 [光学];
学科分类号
070207 ; 0803 ;
摘要
We investigate the effect of passivation structure on the optical mode distribution and characteristics of the edge emitting ridge waveguide AlGaInP-GaInP visible laser diodes (LDs). For conventional designs of single-layer Si3N4 or SiO2 passivation, the variation of lateral near-field confinement and the horizontal far-field (FF) divergence can be determined via the modification of dielectric layer thickness. Thin passivation layer suffers from high absorption at the metal interface while thick passivation layer suffers from poor heat dissipation in the ridge waveguide and high scattering loss, resulting in high threshold. We propose a novel design of three-pair Al2O3/Ta2O5 multilayer optical thin films as passivation on the ridge waveguide, which can improve the laser characteristics and the heat dissipation. The measured room-temperature threshold current (Ith) and characteristic temperature (T-0) are 44.5 mA and 104.2 K with a divergence angle of 16.4. (C) 2013 Elsevier Ltd. All rights reserved.
引用
收藏
页码:110 / 115
页数:6
相关论文
共 11 条
[1]  
BOUR DP, 1994, P SOC PHOTO-OPT INS, V2115, P269, DOI 10.1117/12.172748
[2]   Lasing characteristics of high-performance narrow-stripe InGaAs-GaAs quantum-well lasers confined by AlAs native oxide [J].
Cheng, Y ;
Dapkus, PD ;
MacDougal, MH ;
Yang, GM .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1996, 8 (02) :176-178
[3]   Low-threshold laterally oxidized GaInP-AlGaInP quantum-well laser diodes [J].
Floyd, PD ;
Sun, D ;
Treat, DW .
IEEE PHOTONICS TECHNOLOGY LETTERS, 1998, 10 (01) :45-47
[4]   Thermal noises and noise compensation in high-reflection multilayer coating [J].
Gorodetsky, Michael L. .
PHYSICS LETTERS A, 2008, 372 (46) :6813-6822
[5]  
Ishikawa M, 1986, 18TH INT C SOL STAT, P153
[6]   REAL INDEX-GUIDED ALGAINP VISIBLE LASER WITH HIGH-BANDGAP ENERGY ALINP CURRENT BLOCKING LAYER GROWN BY HCL-ASSISTED METALORGANIC VAPOR-PHASE EPITAXY [J].
KOBAYASHI, R ;
HOTTA, H ;
MIYASAKA, F ;
HARA, K ;
KOBAYASHI, K .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 1995, 1 (02) :723-727
[7]   Real index-guided InGaAlP red lasers with buried tunnel junctions [J].
Lu, TC ;
Shieh, HM ;
Wang, SC .
APPLIED PHYSICS LETTERS, 2002, 80 (11) :1882-1884
[8]   NATIVE-OXIDE TOP-CONFINED AND BOTTOM-CONFINED NARROW STRIPE P-N ALYGA1-YAS-GAAS-INXGA1-XAS QUANTUM-WELL HETEROSTRUCTURE LASER [J].
MARANOWSKI, SA ;
SUGG, AR ;
CHEN, EI ;
HOLONYAK, N .
APPLIED PHYSICS LETTERS, 1993, 63 (12) :1660-1662
[9]   Measurement of the thermal conductivity of TiO2 thin films by using the thermo-reflectance method [J].
Mun, Jungho ;
Kim, Sok Won ;
Kato, Ryozo ;
Hatta, Ichiro ;
Lee, Sang Hyun ;
Kang, Kweon Ho .
THERMOCHIMICA ACTA, 2007, 455 (1-2) :55-59
[10]   Photodynamic therapy (PDT) for lung cancers [J].
Usuda, Jitsuo ;
Kato, Harubumi ;
Okunaka, Tetsuya ;
Furukawa, Kinya ;
Tsutsui, Hidemitsu ;
Yamada, Kimito ;
Suga, Yasuhiro ;
Honda, Hidetoshi ;
Nagatsuka, Yoshitaka ;
Ohira, Tatsuo ;
Tsuboi, Masahiro ;
Hirano, Takashi .
JOURNAL OF THORACIC ONCOLOGY, 2006, 1 (05) :489-493