Surface modification of polycrystalline CVD diamond films with femtosecond laser

被引:0
作者
Natsume, Kohei [1 ]
Liu, Xiaoxu [1 ]
Maegawa, Satoru [1 ]
Itoigawa, Fumihiro [1 ]
Ono, Shingo [1 ]
Ota, Michiharu [2 ]
机构
[1] Nagoya Inst Technol, Showa Ku, Gokiso Cho, Nagoya, Aichi 4668555, Japan
[2] IMRA Amer Inc, 1044 Woodridge Ave, Ann Arbor, MI 48105 USA
来源
2019 CONFERENCE ON LASERS AND ELECTRO-OPTICS (CLEO) | 2019年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The surface modification of CVD diamond irradiated with femtosecond laser of different fluences has been studied and analyzed with Raman spectroscopy. Through comparing with DLC coating processed equally, this improved crystallinity mechanism has been discussed. (c) 2019 The Author(s)
引用
收藏
页数:2
相关论文
共 50 条
[31]   Polycrystalline diamond photonic waveguides realized by femtosecond laser lithography [J].
Hanafi, Haissam ;
Kroesen, Sebastian ;
Lewes-Malandrakis, Georgia ;
Nebel, Christoph ;
Pernice, Wolfram H. P. ;
Denz, Cornelia .
OPTICAL MATERIALS EXPRESS, 2019, 9 (07) :3109-3114
[32]   Hydrogen in polycrystalline CVD diamond [J].
Rutledge, KMM .
HYDROGEN IN SEMICONDUCTORS II, 1999, 61 :283-310
[33]   Microvoids in polycrystalline CVD diamond [J].
McNamara, KM .
OPTICAL MICROSTRUCTURAL CHARACTERIZATION OF SEMICONDUCTORS, 2000, 588 :283-289
[34]   Uniform field emission from polycrystalline CVD-diamond films [J].
Habermann, T ;
Gohl, A ;
Muller, G ;
Pupeter, N ;
Piel, H ;
Aschermann, B ;
Raiko, V ;
Spitzl, R ;
Engemann, J .
IVMC '96 - 9TH INTERNATIONAL VACUUM MICROELECTRONICS CONFERENCE, TECHNICAL DIGEST, 1996, :258-262
[35]   PRODUCTION OF POLYCRYSTALLINE DIAMOND FILMS BY DC GLOW-DISCHARGE CVD [J].
SAMOKHVALOV, NV ;
STRELNITSKIJ, VE ;
BELOUS, VA ;
ZUBAR, VP ;
TIMCHUK, AG ;
OBRAZTSOVA, ED ;
RALCHENKO, VG .
DIAMOND AND RELATED MATERIALS, 1995, 4 (07) :964-967
[36]   FRACTURE STRENGTH MEASUREMENT OF FILAMENT ASSISTED CVD POLYCRYSTALLINE DIAMOND FILMS [J].
CARDINALE, GF ;
ROBINSON, CJ .
JOURNAL OF MATERIALS RESEARCH, 1992, 7 (06) :1432-1437
[37]   Comparative study of optical absorption in diamond powders and polycrystalline CVD films [J].
Obraztsov, AN ;
Okushi, H ;
Watanabe, H ;
Pavlovsky, IY .
DIAMOND AND RELATED MATERIALS, 1997, 6 (09) :1124-1128
[38]   Quantitative investigation of boron incorporation in polycrystalline CVD diamond films by SIMS [J].
Kolber, T ;
Piplits, K ;
Haubner, R ;
Hutter, H .
FRESENIUS JOURNAL OF ANALYTICAL CHEMISTRY, 1999, 365 (08) :636-641
[39]   Relaxation in undoped polycrystalline CVD diamond films under red illumination [J].
Alvarez, J ;
Kleider, JP ;
Bergonzo, P ;
Mer, C ;
Tromson, D ;
Deneuville, A ;
Muret, P .
DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) :635-639
[40]   RAMAN AND X-RAY STUDIES OF POLYCRYSTALLINE CVD DIAMOND FILMS [J].
BACHMANN, PK ;
BAUSEN, HD ;
LADE, H ;
LEERS, D ;
WIECHERT, DU ;
HERRES, N ;
KOHL, R ;
KOIDL, P .
DIAMOND AND RELATED MATERIALS, 1994, 3 (11-12) :1308-1314