Contactless probing of high-frequency electrical signals with scanning probe microscopy

被引:0
作者
Mertin, W [1 ]
机构
[1] Gerhard Mercator Univ Duisburg, Fac Engn Sci, Inst Mat Elect Engn, D-47048 Duisburg, Germany
来源
2002 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3 | 2002年
关键词
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Circuit internal test techniques working in a contactless manner are necessary for failure analysis and design verification of high-speed and high-frequency circuits. A relative new technique is the Scanning Probe Voltage Measurement technique, a technique which is based on scanning probe microscopy. This paper gives an overview of the state-of-the-art of this technique and demonstrates some practical examples.
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页码:1493 / 1496
页数:4
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