Contactless probing of high-frequency electrical signals with scanning probe microscopy

被引：0

作者：

Mertin, W ^{[1
]}

机构：

[1] Gerhard Mercator Univ Duisburg, Fac Engn Sci, Inst Mat Elect Engn, D-47048 Duisburg, Germany

来源：

2002 IEEE MTT-S INTERNATIONAL MICROWAVE SYMPOSIUM DIGEST, VOLS 1-3 | 2002年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Circuit internal test techniques working in a contactless manner are necessary for failure analysis and design verification of high-speed and high-frequency circuits. A relative new technique is the Scanning Probe Voltage Measurement technique, a technique which is based on scanning probe microscopy. This paper gives an overview of the state-of-the-art of this technique and demonstrates some practical examples.

引用

页码：1493 / 1496

页数：4

共 28 条

[1] Absolute quantitative time resolved voltage measurements on 1 mu m conducting lines of integrated circuits via electric force microscope-(EFM-) testing
Bangert, J
Kubalek, E
[J]. MICROELECTRONICS AND RELIABILITY, 1997, 37 (10-11): : 1579 - 1582
[2] Cross-talk in electric force microscopy testing of parallel submicrometer conducting lines
Behnke, U
Mertin, W
Kubalek, E
[J]. MICROELECTRONICS RELIABILITY, 2000, 40 (8-10) : 1401 - 1406
[3] VOLTAGE CONTRAST IN INTEGRATED-CIRCUITS WITH 100 NM SPATIAL-RESOLUTION BY SCANNING FORCE MICROSCOPY
BOHM, C
SAURENBACH, F
TASCHNER, P
ROTHS, C
KUBALEK, E
[J]. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 1993, 26 (10) : 1801 - 1805
[4] SCANNING-FORCE-MICROSCOPE TEST SYSTEM FOR DEVICE INTERNAL TEST WITH HIGH SPATIAL AND TEMPORAL RESOLUTION
BOHM, C
ROTHS, C
KUBALEK, E
[J]. MICROELECTRONIC ENGINEERING, 1994, 24 (1-4) : 91 - 98
[5] HIGH-FREQUENCY CIRCUIT CHARACTERIZATION USING THE AFM AS A REACTIVE NEAR-FIELD PROBE
BRIDGES, GE
THOMSON, DJ
[J]. ULTRAMICROSCOPY, 1992, 42 : 321 - 328
[6] Non-contact probing of high speed microelectronics using electrostatic force sampling
Bridges, GE
Noruttun, D
Said, RA
Thomson, DJ
Lam, T
Qi, R
[J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (02): : 830 - 833
[7] SAMPLED WAVE-FORM MEASUREMENT IN INTEGRATED-CIRCUITS USING HETERODYNE ELECTROSTATIC FORCE MICROSCOPY
BRIDGES, GE
SAID, RA
MITTAL, M
THOMSON, DJ
[J]. REVIEW OF SCIENTIFIC INSTRUMENTS, 1994, 65 (11) : 3378 - 3381
[8] Falkingham C.J., 2000 IEEE MTT S
[9] Scanning probe microscopy for testing ultrafast electronic devices
Hou, AS
Nechay, BA
Ho, F
Bloom, DM
[J]. OPTICAL AND QUANTUM ELECTRONICS, 1996, 28 (07) : 819 - 841
[10] PICOSECOND ELECTRICAL SAMPLING USING A SCANNING FORCE MICROSCOPE
HOU, AS
HO, F
BLOOM, DM
[J]. ELECTRONICS LETTERS, 1992, 28 (25) : 2302 - 2303

← 1 2 3 →