InP-based photonic micro-sensor for near field optical investigations

被引：4

作者：

Bélier, B ^{[1
]}

Castagne, M

Falgayrettes, P

Bonnafé, J

Santoso, A

Leclercq, JL

机构：

[1] Univ Montpellier 2, LINCS, Ctr Elect & Microoptoelect Montpellier, F-34095 Montpellier 5, France

[2] Ecole Cent Lyon, LEAME, UMR CNRS 5512, F-69131 Ecully, France

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2000年 / 18卷 / 01期

关键词：

D O I：

10.1116/1.591156

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This article describes the fabrication process for an InP-based atomic force microscopy (AFM)-type cantilever that is equipped with a micro-photonic sensor. This cantilever, intended to be associated with a diamond supertip, will make it possible to obtain synchronous AFM and near held optical (NFO) images in a scanning operation. The mechanical, electrical and optical performance of the photonic sensor is detailed. This photonic sensor was successfully used as a photodetector. It is possible to integrate the system into a hybrid data processing circuit. Such a cantilever could be used simultaneously in;the NFO mode and in AFM operations. (C) 2000 American Vacuum Society.

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页码：90 / 93

页数：4

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