Stability of thin platinum films implemented in high-temperature microdevices

被引：166
作者：
Tiggelaar, R. M. [1 ]
Sanders, R. G. R. [1 ]
Groenland, A. W. [1 ]
Gardeniers, J. G. E. [1 ]
机构：
[1] Univ Twente, Inst Nanotechnol, MESA, NL-7500 AE Enschede, Netherlands
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2009年 / 152卷 / 01期
关键词：
Thin films; Microheaters; Platinum; Temperature sensors; Microreactors; PT/TI BILAYER; SILICON; ELECTRODES; TI; RESISTANCE; ADHESION; METALLIZATION; COEFFICIENT; RELIABILITY; FABRICATION;
D O I：
10.1016/j.sna.2009.03.017
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper we report on Structural and electrical properties of thin films of Pt with Ti, Ta, or no adhesion, which were annealed in different ambient at temperatures in the range 400-950 C. Correlations are made between the mechanical strain and grain size values obtained from X-ray diffraction, electrical measurements. and optical microscope images of film sintering after annealing at high temperature. A method to obtain highly adhesive, patterned Pt Mills Without adhesion layer is presented, which films show the highest reliability, in terms of structural integrity and electrical properties. Therefore this is the best option for implementation in high-temperature microdevices like microreactors and gas sensors operating at temperatures above 750 C. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：39 / 47
页数：9
相关论文
共 66 条
[1]  
Al-Shareef H. N., 1993, Integrated Ferroelectrics, V3, P321, DOI 10.1080/10584589308216687
[2]   Microsystem for high-temperature gas phase reactions [J].
Alépée, C ;
Vulpescu, L ;
Cousseau, P ;
Renaud, P ;
Maurer, R ;
Renken, A .
MEASUREMENT & CONTROL, 2000, 33 (09) :265-268
[3]  
ALEPEE C, 2000, THESIS EPFL LAUSANNE, P53510
[4]   Microarc plasma treatment of titanium and aluminum surfaces in electrolytes [J].
Anita, V ;
Saito, N ;
Takai, O .
THIN SOLID FILMS, 2006, 506 :364-368
[5]  
[Anonymous], 1996, HDB CHEM PHYS
[6]  
[Anonymous], 1978, THIN FILM PROCESSES
[7]   A microfabricated suspended-tube chemical reactor for thermally efficient fuel processing [J].
Arana, LR ;
Schaevitz, SB ;
Franz, AJ ;
Schmidt, MA ;
Jensen, KF .
JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2003, 12 (05) :600-612
[8]   Failure analysis of micro-heating elements suspended on thin membranes [J].
Briand, D ;
Beaudoin, F ;
Courbat, J ;
de Rooij, NF ;
Desplats, R ;
Perdu, P .
MICROELECTRONICS RELIABILITY, 2005, 45 (9-11) :1786-1789
[9]   Processing influence on the reliability of platinum thin films for MEMS applications [J].
Briand, D ;
Heimgartner, S ;
Leboeuf, M ;
Dadras, M ;
de Rooij, NF .
BIOMEMS AND BIONANOTECHNOLOGY, 2002, 729 :63-68
[10]  
BRUCHHAUS R, 1992, MATER RES SOC S P, V243, P123
1234567