System level simulation of a double stator wobble electrostatic micromotor

System level simulation results of an electrostatic micromotor, based on closed-form expressions of the static and dynamic torque behaviours, are presented. A double stator, double rotor, wobble motor designed and tested at Heriot Watt University is simulated using the high level language very high speed integrated circuits (VHSIC) hardware description language-analogue mixed signal (VHDL-AMS). The analytical torque model is obtained by two conformal mapping transformations of the electrostatic gap region between the stator and rotor surfaces. Torque results obtained by finite element analysis methods and the proposed simulation model show good agreement. Simulation results of the closed-loop control of the excitation of the motor, based on thedynamic model of the torque, are also presented. (C) 2002 Elsevier Science B.V. All rights reserved.