Broad, intense, quiescent beam of singly charged metal ions obtained by extraction from self-sputtering plasma far above the runaway threshold

被引:13
作者
Anders, Andre [1 ]
Oks, Efim [2 ]
机构
[1] Univ Calif Berkeley, Lawrence Berkeley Lab, Berkeley, CA 94720 USA
[2] Russian Acad Sci, Inst High Current Elect, Tomsk 634055, Russia
关键词
VACUUM-ARC PLASMAS; STATE DISTRIBUTIONS; ELECTRON-EMISSION; CROSS-SECTIONS;
D O I
10.1063/1.3177336
中图分类号
O59 [应用物理学];
学科分类号
摘要
Dense metal plasmas obtained by self-sputtering far above the runway threshold are well suited to generate intense quiescent ion beams. The dilemma of high current density and charge state purity can be solved when using target materials of low surface binding energy by utilizing nonresonant exchange reactions before ion extraction. Space-charge-limited quiescent beams of Cu+, Zn+, and Bi+ with similar to 10 mA/cm(2) have been obtained through multiaperture gridded ion extraction up to 45 kV from self-sputtering plasmas. (C) 2009 American Institute of Physics. [DOI: 10.1063/1.3177336]
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页数:5
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