Phase calculation of (100) oriented InGaAsSb grown with liquid phase epitaxy

被引:0
|
作者
Mao, XJ [1 ]
Chan, YC [1 ]
Lam, YL [1 ]
机构
[1] Nanyang Technol Univ, Sch Elect & Elect Engn, Photon Res Grp, Singapore 639798, Singapore
来源
DESIGN, FABRICATION AND CHARACTERIZATION OF PHOTONIC DEVICES | 1999年 / 3896卷
关键词
liquid phase epitaxy; GaSb; InxGa1-xAsySb1-y; mid-infrared; phase diagram;
D O I
10.1117/12.370354
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The solidus-liquidus phase diagram of (100) oriented InxGa1-xAsySb1-y quaternary alloy, which is lattice-matched to the GaSb substrate, has been calculated. We used the Levenberg-Marquardt method (least squares minimization) to deal with the nonlinear equations and find the phase curves at different temperatures. We obtained a series of phase diagrams from 500 degrees C to 730 degrees C. The phase plots of the indium content in the GaSb-lattice matched InxGa1-xAsySb1-y quaternary as a function of the antimony content of the melt at different temperatures bear three kinds of shapes. The plots below 532.7 degrees C are similar, displaying a hyperbola with two branches, and the lower the temperature, the larger is the gap between the branches. The phase plot changes to two intersected lines at 532.7 degrees C. At temperatures higher than 532.7 degrees C, the phase diagram includes a nearly symmetrical curve and a segment. The higher is the temperature, the shorter is the segment. A new growth region have been discovered, where GaSb-lattice matched InxGa1-xAsySb1-y with high indium content can be grown.
引用
收藏
页码:499 / 506
页数:4
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