Growth of diamond films on crystalline silicon by hot-filament chemical vapor deposition

被引：8
|
作者：
Baidakova, MV
Vul', AY
Golubev, VG
Grudinkin, SA
Melekhin, VG
Feoktistov, NA
Krüger, A
机构：
[1] Russian Acad Sci, AF Ioffe Physicotech Inst, St Petersburg 184021, Russia
[2] Toyohashi Univ Technol, Toyohashi, Aichi 4418580, Japan
来源：
SEMICONDUCTORS | 2002年 / 36卷 / 06期
关键词：
D O I：
10.1134/1.1485657
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
The effect of hot-filament chemical vapor deposition conditions on the phase composition of diamond films grown on a silicon substrate was studied. The growth conditions providing the highest content of diamond phase at a growth rate of about 1 mum/h were ascertained. (C) 2002 MAIK "Nauka/Interperiodica".
引用
收藏
页码：615 / 620
页数：6
相关论文
共 50 条
  • [1] Growth of diamond films on crystalline silicon by hot-filament chemical vapor deposition
    M. V. Baidakova
    A. Ya. Vul’
    V. G. Golubev
    S. A. Grudinkin
    V. G. Melekhin
    N. A. Feoktistov
    A. Krüger
    Semiconductors, 2002, 36 : 615 - 620
  • [2] DIAMOND GROWTH ON POROUS SILICON BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION
    LIU, ZH
    ZONG, BQ
    LIN, ZD
    THIN SOLID FILMS, 1995, 254 (1-2) : 3 - 6
  • [3] Growth of nanocrystalline diamond films on quartz by hot-filament chemical vapor deposition
    Tsai, H. Y.
    Yu, K. H.
    Yeh, M. K.
    JOURNAL OF CERAMIC PROCESSING RESEARCH, 2015, 16 (05): : 584 - 590
  • [4] Controllable Growth of Nanocrystalline Diamond Films by Hot-Filament Chemical Vapor Deposition Method
    Li, Yunlong
    Li, Junjie
    Wang, Qiang
    Yang, Yang
    Gu, Changzhi
    JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, 2009, 9 (02) : 1062 - 1065
  • [5] THE GROWTH-KINETICS OF DIAMOND FILMS DEPOSITED BY HOT-FILAMENT CHEMICAL VAPOR-DEPOSITION
    KWEON, DW
    LEE, JY
    KIM, DH
    JOURNAL OF APPLIED PHYSICS, 1991, 69 (12) : 8329 - 8335
  • [6] Simultaneous growth of diamond and nanostructured graphite thin films by hot-filament chemical vapor deposition
    Ali, M.
    Urgen, M.
    SOLID STATE SCIENCES, 2012, 14 (01) : 150 - 154
  • [7] Deposition of Diamond Films on Complex Cutting Tools by Hot-Filament Chemical Vapor Deposition
    Wang, Tao
    Zhang, Song-Quan
    Jiang, Chun-Lei
    Tang, Yong-Bing
    MATERIALS IN ENVIRONMENTAL ENGINEERING, 2017, : 149 - 156
  • [8] Selective area deposition of diamond thin films on patterns of porous silicon by hot-filament chemical vapor deposition
    1600, American Inst of Physics, Woodbury, NY, USA (67):
  • [9] SYNTHESIS OF ORIENTED TEXTURED DIAMOND FILMS ON SILICON VIA HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION
    CHEN, QJ
    YANG, J
    LIN, ZD
    APPLIED PHYSICS LETTERS, 1995, 67 (13) : 1853 - 1855
  • [10] DIAMOND GROWTH ON TURBOSTRATIC CARBON BY HOT-FILAMENT CHEMICAL-VAPOR-DEPOSITION
    YU, ZM
    ROGELET, T
    FLODSTROM, SA
    JOURNAL OF APPLIED PHYSICS, 1993, 74 (12) : 7235 - 7240
12345