Fabrication and characterization of diamond-like carbon thin films by pulsed laser deposition

被引：13
作者：
Shim, KS
Kim, SM
Bac, SH
Lee, SY
Jung, HS
Park, HH
机构：
[1] Yonsei Univ, Dept Elect Engn, Seodaemun Ku, Seoul 120749, South Korea
[2] Yonsei Univ, Dept Ceram Engn, Seodaemun Ku, Seoul 120749, South Korea
来源：
APPLIED SURFACE SCIENCE | 2000年 / 154卷
基金：
新加坡国家研究基金会;
关键词：
pulsed laser deposition; negative electron affinity; diamond-like carbon; field emission property;
D O I：
10.1016/S0169-4332(99)00401-8
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
Diamond-like carbon (DLC) thin films have shown advantageous field emission properties due to a negative electron affinity (NEA) and low work function. The experiment was performed at substrate temperature in the range of room temperature to 600 degrees C. The laser energy density used was in the range 6-20 J/cm(2), SEM, Raman, photoluminescence (PL), XPS and I-V measurement were used to investigate the microstructure and the field emission properties of DLC thin films. Deposition parameters, such as laser energy density and substrate temperature were optimized for the application of field emission proper-ties. Good field emission properties were obtained with E-th = 5.03 V/mu m at 300 degrees C and 12 J/cm(2). (C) 2000 Elsevier Science B.V. All rights reserved.
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收藏
页码：482 / 484
页数：3
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