Elaboration and characterization of Co doped, conductive ZnO thin films deposited by radio-frequency magnetron sputtering at room temperature

被引：45
作者：
El Mir, L. [1 ]
Ben Ayadi, Z. [1 ]
Rahmouni, H. [1 ]
El Ghoul, J. [1 ]
Djessas, K. [2 ]
von Bardeleben, H. J. [3 ]
机构：
[1] Fac Sci Gabes, Lab Phys Mat & Nanomat Appl Environm, Gabes 6072, Tunisia
[2] Univ Perpignan, Lab Math & Phys Syst, F-66860 Perpignan, France
[3] Univ Paris 06, INSP, CNRS, UMR 7588, F-75015 Paris, France
来源：
THIN SOLID FILMS | 2009年 / 517卷 / 21期
关键词：
Nanostructures; Thin films; Sputtering; Zinc oxide; Transparent conductive oxide (TCO); X-ray diffraction; Electrical properties and measurements; Electron paramagnetic resonance spectroscopy; ZINC-OXIDE FILMS; TRANSPARENT; SILICON; AL;
D O I：
10.1016/j.tsf.2009.03.197
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nanocrystalline, highly (at.%) Co doped ZnO powder, obtained by a modified sol-gel method, was used as a target material for the growth of pm thin films by radio frequency magnetron sputtering. The films were deposited at room temperature on quartz substrates. The as-deposited films were polycrystalline but highly textured with the c-axis aligned normal to the substrate plane. They present high optical transmittance in the visible range of approximately 90%, a carrier concentration of about 10(20) cm(-3) and electrical resistivity of 10(-3) Omega cm at room temperature. The analysis of the Co2+ spectrum by electron paramagnetic resonance (EPR) showed the Co to be incorporated substitutionally and the angular variation EPR spectrum demonstrates a monocrystal like texturing of the films with the c-axis normal to the film plane. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：6007 / 6011
页数：5
相关论文
共 31 条
  • [21] USE OF ZNO IN TRANSPARENT TYPE MIS SOLAR-CELLS
    PETROU, P
    SINGH, R
    BRODIE, DE
    [J]. APPLIED PHYSICS LETTERS, 1979, 35 (12) : 930 - 931
  • [22] Air-annealing effects on polycrystalline Cu(In,Ga)Se2 heterojunctions
    Rau, U
    Braunger, D
    Schock, HW
    [J]. SOLID STATE PHENOMENA, 1999, 67-8 : 409 - 414
  • [23] New materials and deposition techniques for highly efficient silicon thin film solar cells
    Rech, B
    Kluth, O
    Repmann, T
    Roschek, T
    Springer, J
    Müller, J
    Finger, F
    Stiebig, H
    Wagner, H
    [J]. SOLAR ENERGY MATERIALS AND SOLAR CELLS, 2002, 74 (1-4) : 439 - 447
  • [24] Potential of amorphous silicon for solar cells
    Rech, B
    Wagner, H
    [J]. APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 1999, 69 (02): : 155 - 167
  • [25] PROPERTIES OF ZINC-OXIDE FILMS PREPARED BY THE OXIDATION OF DIETHYL ZINC
    ROTH, AP
    WILLIAMS, DF
    [J]. JOURNAL OF APPLIED PHYSICS, 1981, 52 (11) : 6685 - 6692
  • [26] Fabrication of highly efficient polythiophene-sensitized metal oxide photovoltaic cells
    Senadeera, GKR
    Nakamura, K
    Kitamura, T
    Wada, Y
    Yanagida, S
    [J]. APPLIED PHYSICS LETTERS, 2003, 83 (26) : 5470 - 5472
  • [27] Photovoltaic effect observed in transparent p-n heterojunctions based on oxide semiconductors
    Tonooka, K
    Bando, H
    Aiura, Y
    [J]. THIN SOLID FILMS, 2003, 445 (02) : 327 - 331
  • [28] Optical and magnetic properties of ZnCoO thin films synthesized by electrodeposition
    Tortosa, M.
    Mollar, M.
    Mari, B.
    Lloret, F.
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 104 (03)
  • [29] Ferromagnetic resonance signature of metallic Co clusters in ferromagnetic ZnCoO thin films
    von Bardeleben, H. J.
    Jedrecy, N.
    Cantin, J. L.
    [J]. APPLIED PHYSICS LETTERS, 2008, 93 (14)
  • [30] Stabilization of ferromagnetism in Mn doped ZnO with C co-doping
    Yadav, Manoj K.
    Sanyal, Biplab
    Mookerjee, Abhijit
    [J]. JOURNAL OF MAGNETISM AND MAGNETIC MATERIALS, 2009, 321 (04) : 273 - 276
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