Elaboration and characterization of Co doped, conductive ZnO thin films deposited by radio-frequency magnetron sputtering at room temperature

被引：45
作者：
El Mir, L. [1 ]
Ben Ayadi, Z. [1 ]
Rahmouni, H. [1 ]
El Ghoul, J. [1 ]
Djessas, K. [2 ]
von Bardeleben, H. J. [3 ]
机构：
[1] Fac Sci Gabes, Lab Phys Mat & Nanomat Appl Environm, Gabes 6072, Tunisia
[2] Univ Perpignan, Lab Math & Phys Syst, F-66860 Perpignan, France
[3] Univ Paris 06, INSP, CNRS, UMR 7588, F-75015 Paris, France
来源：
THIN SOLID FILMS | 2009年 / 517卷 / 21期
关键词：
Nanostructures; Thin films; Sputtering; Zinc oxide; Transparent conductive oxide (TCO); X-ray diffraction; Electrical properties and measurements; Electron paramagnetic resonance spectroscopy; ZINC-OXIDE FILMS; TRANSPARENT; SILICON; AL;
D O I：
10.1016/j.tsf.2009.03.197
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
Nanocrystalline, highly (at.%) Co doped ZnO powder, obtained by a modified sol-gel method, was used as a target material for the growth of pm thin films by radio frequency magnetron sputtering. The films were deposited at room temperature on quartz substrates. The as-deposited films were polycrystalline but highly textured with the c-axis aligned normal to the substrate plane. They present high optical transmittance in the visible range of approximately 90%, a carrier concentration of about 10(20) cm(-3) and electrical resistivity of 10(-3) Omega cm at room temperature. The analysis of the Co2+ spectrum by electron paramagnetic resonance (EPR) showed the Co to be incorporated substitutionally and the angular variation EPR spectrum demonstrates a monocrystal like texturing of the films with the c-axis normal to the film plane. (C) 2009 Elsevier B.V. All rights reserved.
引用
收藏
页码：6007 / 6011
页数：5
相关论文
共 31 条
  • [1] Armelao L, 2001, THIN SOLID FILMS, V394, P90, DOI 10.1016/S0040-6090(01)01158-0
  • [2] Growth characteristics and residual stress of RF magnetron sputtered ZnO:Al films
    Chang, JF
    Shen, CC
    Hon, MH
    [J]. CERAMICS INTERNATIONAL, 2003, 29 (03) : 245 - 250
  • [3] Plasma assisted molecular beam epitaxy of ZnO on c-plane sapphire: Growth and characterization
    Chen, YF
    Bagnall, DM
    Koh, HJ
    Park, KT
    Hiraga, K
    Zhu, ZQ
    Yao, T
    [J]. JOURNAL OF APPLIED PHYSICS, 1998, 84 (07) : 3912 - 3918
  • [4] TRANSPARENT CONDUCTORS - A STATUS REVIEW
    CHOPRA, KL
    MAJOR, S
    PANDYA, DK
    [J]. THIN SOLID FILMS, 1983, 102 (01) : 1 - 46
  • [5] Search for improved transparent conducting oxides:: A fundamental investigation of CdO, Cd2SnO4, and Zn2SnO4
    Coutts, TJ
    Young, DL
    Li, X
    Mulligan, WP
    Wu, X
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 2000, 18 (06): : 2646 - 2660
  • [6] Cullity B.D., 1978, ELEMENTS XRAY DIFFRA, V2nd, P102
  • [7] Microstructure control of ZnO thin films prepared by single source chemical vapor deposition
    Deng, H
    Russell, JJ
    Lamb, RN
    Jiang, B
    Li, Y
    Zhou, XY
    [J]. THIN SOLID FILMS, 2004, 458 (1-2) : 43 - 46
  • [8] Magnetization and Raman scattering studies of (Co,Mn) codoped ZnO nanoparticles
    Duan, L. B.
    Rao, G. H.
    Wang, Y. C.
    Yu, J.
    Wang, T.
    [J]. JOURNAL OF APPLIED PHYSICS, 2008, 104 (01)
  • [9] Preparation and characterization of n-type conductive (Al, Co) co-doped ZnO thin films deposited by sputtering from aerogel nanopowders
    El Mir, L.
    Ben Ayadi, Z.
    Saadoun, M.
    Djessas, K.
    von Bardeleben, H. J.
    Alaya, S.
    [J]. APPLIED SURFACE SCIENCE, 2007, 254 (02) : 570 - 573
  • [10] Optical, electrical and magnetic properties of transparent, n-type conductive Zn0.90-x,V0.10AlxO thin films elaborated from aerogel nanoparticles
    El Mir, L.
    Ben Ayadi, Z.
    Saadoun, M.
    von Bardeleben, H. J.
    Djessas, K.
    Zeinert, A.
    [J]. PHYSICA STATUS SOLIDI A-APPLICATIONS AND MATERIALS SCIENCE, 2007, 204 (10): : 3266 - 3277
1234