Characterization of multilayers of thin films by measurement of X-ray specular reflectivity

被引:0
|
作者
Durand, O
机构
来源
VIDE-SCIENCE TECHNIQUE ET APPLICATIONS | 2002年 / 57卷 / 304期
关键词
D O I
暂无
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
引用
收藏
页码:387 / 429
页数:43
相关论文
共 50 条
  • [1] CHARACTERIZATION OF THIN-FILMS AND MULTILAYERS BY SPECULAR X-RAY REFLECTIVITY
    PLOTZ, WM
    LISCHKA, K
    JOURNAL DE PHYSIQUE III, 1994, 4 (09): : 1503 - 1511
  • [2] Characterization of multilayers of thin films by measurement of x-ray specular reflectivity (vol 57, pg 387, 2002)
    Durand, O
    VIDE-SCIENCE TECHNIQUE ET APPLICATIONS, 2002, 57 (305): : 621 - 621
  • [3] Thin film and surface characterization by specular X-ray reflectivity
    Chason, E
    Mayer, TM
    CRITICAL REVIEWS IN SOLID STATE AND MATERIALS SCIENCES, 1997, 22 (01) : 1 - 67
  • [4] Thickness measurement of thin films and multilayers using Fourier transform of X-ray reflectivity
    Tiwari, U
    Sharma, RK
    Sehgal, BK
    Goyal, A
    Sharma, BB
    Kumar, V
    PROCEEDINGS OF THE ELEVENTH INTERNATIONAL WORKSHOP ON THE PHYSICS OF SEMICONDUCTOR DEVICES, VOL 1 & 2, 2002, 4746 : 1014 - 1017
  • [5] The Coherent Limitation of the Specular X-ray and Neutron Reflectivity on the Characterization of the Physical Vapor Deposition Thin Films
    Lee, Chih-Hao
    Chuang, Pei-Yu
    Lin, Yu-Shou
    Wu, Yu-Han
    CHINESE JOURNAL OF PHYSICS, 2012, 50 (02) : 301 - 310
  • [6] Recent advances in characterization of ultra-thin films using specular X-ray reflectivity technique
    Banerjee, S
    Ferrari, S
    Chateigner, D
    Gibaud, A
    THIN SOLID FILMS, 2004, 450 (01) : 23 - 28
  • [7] Fitting of x-ray or neutron specular reflectivity of multilayers by Fourier analysis
    Li, M
    Moller, MO
    Landwehr, G
    JOURNAL OF APPLIED PHYSICS, 1996, 80 (05) : 2788 - 2790
  • [8] Soft x-ray resonant magnetic reflectivity study of thin films and multilayers
    Tonnerre, JM
    Sève, L
    Barbara-Dechelette, A
    Bartolomé, F
    Raoux, D
    Chakarian, V
    Kao, CC
    Fischer, H
    Andrieu, S
    Fruchart, O
    JOURNAL OF APPLIED PHYSICS, 1998, 83 (11) : 6293 - 6295
  • [9] The phase problem for X-ray specular reflectivity from thin films: A new approach
    Babanov, Yuri
    Salamatov, Yuri
    Vasin, Vladimir
    Ustinov, Vladimir
    SUPERLATTICES AND MICROSTRUCTURES, 2015, 82 : 612 - 622
  • [10] Characterization of multilayers by Fourier analysis of x-ray reflectivity
    Voorma, HJ
    Louis, E
    Koster, NB
    Bijkerk, F
    Spiller, E
    JOURNAL OF APPLIED PHYSICS, 1997, 81 (09) : 6112 - 6119