Simulation study of sputtering process.

被引:0
|
作者
Sharma, KR [1 ]
机构
[1] Deemed Univ, Vellore Inst Technol, Vellore 632014, Tamil Nadu, India
来源
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 2002年 / 223卷
关键词
D O I
暂无
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
120-COMP
引用
收藏
页码:U481 / U481
页数:1
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