Characterization of polycrystalline silicon-based photonic crystal-suspended membrane for high temperature applications

被引：18
作者：
Ho, Chong Pei [1 ,2 ]
Pitchappa, Prakash [1 ,2 ]
Kropelnicki, Piotr [2 ]
Wang, Jian [2 ]
Cai, Hong [2 ]
Gu, Yuandong [2 ]
Lee, Chengkuo [1 ]
机构：
[1] Natl Univ Singapore, Dept Elect & Comp Engn, Singapore 117576, Singapore
[2] ASTAR, Inst Microelect, Singapore 117685, Singapore
来源：
JOURNAL OF NANOPHOTONICS | 2014年 / 8卷
关键词：
optics; photonic crystal membrane; thermo-optic effect; high temperature applications; FILM MULTILAYERS; RING-RESONATOR; BROAD-BAND; WAVE-GUIDE; DESIGN; FIBER; FABRICATION; REFLECTION; FILTER; GAS;
D O I：
10.1117/1.JNP.8.084096
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
We present the design and the characterization of a polycrystalline silicon (Si)-based photonic crystal (PhC)-suspended membrane, working in the mid-infrared wavelengths. In order to facilitate transmission measurement, the PhC membrane is released by removing the underneath Si substrate. Around 97% reflection and 3% transmission at 3.58-mu m wavelength are measured at room temperature. Characterization is also done at 450 degrees C and it reveals that the peak reflection of the PhC membrane shifts by 75 nm to higher wavelengths. This corresponds to a linear wavelength shift of 0.174 nm/degrees C and the thermo-optic coefficient is calculated to be + 1.70 x 10(-4) K-1. By altering the dimension of the PhC air holes, it is also shown that such a thermo-optic effect is compensated. (C) 2014 Society of Photo-Optical Instrumentation Engineers (SPIE)
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页数：8
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