Vibrational analysis of electrostatically actuated microstructures considering nonlinear effects

被引：79

作者：

Moghimi Zand, Mahdi ^{[1
]}

Ahmadian, M. T. ^{[1
]}

机构：

[1] Sharif Univ Technol, Sch Mech Engn, Ctr Excellence Design Robot & Automat, Tehran, Iran

来源：

COMMUNICATIONS IN NONLINEAR SCIENCE AND NUMERICAL SIMULATION | 2009年 / 14卷 / 04期

关键词：

Squeeze film damping; Pull-in instability; Multi-layer microplates; Vibrations; Nonlinearity; PULL-IN VOLTAGE; BEAMS; MODEL;

D O I：

10.1016/j.cnsns.2008.05.009

中图分类号：

O29 [应用数学];

学科分类号：

070104 ;

摘要：

The vibrational behavior of electrostatically actuated microstructures subjected to nonlinear squeeze film damping and in-plane forces is investigated. First-Order Shear Deformation Theory is used to model dynamical system by means of finite element method, while finite difference method is applied to solve the nonlinear Reynolds equation of squeeze film damping simultaneously. Vibrational analysis of microplates is performed by solving eigenvalue problem, after validating the model by pull-in phenomenon and transient behavior. In addition, considering nonlinear squeeze film damping and step-input actuations, response frequencies of microplates are calculated. Effect of ambient pressure and in-plane forces on dynamic pull-in phenomenon is also studied. Results for simplified models are verified and are in good agreement with the published literature. This investigation can reveal nonlinear vibrational behavior of microstructures. (c) 2008 Published by Elsevier B.V.

引用

页码：1664 / 1678

页数：15

共 14 条

[1] Optimal design of an electrostatically actuated microbeam for maximum pull-in voltage
Abdalla, MM
Reddy, CK
Faris, WF
Gürdal, Z
[J]. COMPUTERS & STRUCTURES, 2005, 83 (15-16) : 1320 - 1329
[2] A closed-form model for the pull-in voltage of electrostatically actuated cantilever beams
Chowdhury, S
Ahmadi, M
Miller, WC
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2005, 15 (04) : 756 - 763
[3] Complex nonlinear oscillations in electrostatically actuated microstructures
De, SK
Aluru, NR
[J]. JOURNAL OF MICROELECTROMECHANICAL SYSTEMS, 2006, 15 (02) : 355 - 369
[4] Pull-in dynamics of an elastic beam actuated by continuously distributed electrostatic force
Krylov, S
Maimon, R
[J]. JOURNAL OF VIBRATION AND ACOUSTICS-TRANSACTIONS OF THE ASME, 2004, 126 (03): : 332 - 342
[5] Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures
Krylov, Slava
[J]. INTERNATIONAL JOURNAL OF NON-LINEAR MECHANICS, 2007, 42 (04) : 626 - 642
[6] Characterization of coupled-domain multi-layer microplates in pull-in phenomenon, vibrations and dynamics
Moghimi Zand, Mahdi
Ahmadian, M. T.
[J]. INTERNATIONAL JOURNAL OF MECHANICAL SCIENCES, 2007, 49 (11) : 1226 - 1237
[7] A new approach to the modeling and simulation of flexible microstructures under the effect of squeeze-film damping
Nayfeh, AH
Younis, MI
[J]. JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2004, 14 (02) : 170 - 181
[8] Osterberg P.M., 1995, Ph.D. thesis
[9] Experimental modal analysis for microelectromechanical systems
Ozdoganlar, OB
Hansche, BD
Carne, T
[J]. EXPERIMENTAL MECHANICS, 2005, 45 (06) : 498 - 506
[10] Reddy J.N., 2003, MECH LAMINATED COMPO, V2nd ed., DOI [10.1201/b12409, DOI 10.1201/B12409]

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