Color Imaging via Nearest Neighbor Hole Coupling in Plasmonic Color Filters Integrated onto a Complementary Metal-Oxide Semiconductor Image Sensor

被引:147
作者
Burgos, Stanley P. [1 ]
Yokogawa, Sozo [1 ,2 ]
Atwater, Harry A. [1 ]
机构
[1] CALTECH, Pasadena, CA 91125 USA
[2] Sony Corp, Atsugi, Kanagawa 2430014, Japan
基金
美国国家科学基金会;
关键词
CMOS image sensor; hole array color filter; OPTICAL-TRANSMISSION; SUBWAVELENGTH HOLES; SURFACE-PLASMONS; ARRAYS; LIGHT; EFFICIENCY;
D O I
10.1021/nn403991d
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
State-of-the-art CMOS imagers are composed of very small pixels, so it is critical for plasmonic imaging to understand the optical response of finite-size hole arrays and their coupling efficiency to CMOS image sensor pixels. Here, we demonstrate that the transmission spectra of finite-size hole arrays can be accurately described by only accounting for up to the second nearest-neighbor scattering-absorption interactions of hole pairs, thus making hole arrays appealing for close-packed color filters for imaging applications. Using this model, we find that the peak transmission efficiency of a square-shaped hole array with a triangular lattice reaches similar to 90% that of an infinite array at an extent of similar to 6 x 6 mu m(2), the smallest size array showing near-infinite array transmission properties. Finally, we experimentally validate our findings by investigating the transmission and imaging characteristics of a 360 x 320 pixel plasmonic color filter array composed of 5.6 x 5.6 mu m(2) RGB color filters integrated onto a commercial black and white 1/2.8 in. CMOS image sensor, demonstrating full-color high resolution plasmonic imaging. Our results show good color fidelity with a 6-color-averaged color difference metric (Delta E) in the range of 16.6-19.3, after white balancing and color-matrix correcting raw images taken with f-numbers ranging from 1.8 to 16. The integrated peak filter transmission efficiencies are measured to be in the 50% range, with a FWHM of 200 nm for all three RGB filters, in good agreement with the spectral response of isolated unmounted color filters.
引用
收藏
页码:10038 / 10047
页数:10
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