Sol-gel;
Zirconium dioxide;
ZrO2;
Resistive random access memories;
Multi level;
CHARGE-LIMITED CURRENTS;
RESISTANCE;
TRANSISTORS;
MECHANISMS;
TRANSPORT;
DEVICE;
D O I:
10.1016/j.tsf.2017.01.063
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Sol-gel processed ZrO2 was used as the main active channel material for a resistive switching memory device implemented on Indium Tin oxide coated glass substrates. The memory properties of the deposited ZrO2 layers depended on the top electrode material. Inert Au top electrodes did not yield resistive switching memory properties, while Ag top electrodes provided conventional resistive switching memory properties, with sharp on and off switching operation. In contrast, Ti top electrodes provided smooth on and off switching operation, and modifying the pulse widths and voltages allowed good control over the resistivity. The fabricated Au/Ti/ZrO2/ITO systems exhibited four different resistance levels, and good multi level storage characteristics were observed for at least 104 cycles without degradation. (C) 2017 Elsevier B.V. All rights reserved.
机构:
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou 215123, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Qi, Yanfei
Shen, Zongjie
论文数: 0引用数: 0
h-index: 0
机构:
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou 215123, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Shen, Zongjie
Zhao, Chun
论文数: 0引用数: 0
h-index: 0
机构:
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou 215123, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Zhao, Chun
Zhao, Ce Zhou
论文数: 0引用数: 0
h-index: 0
机构:
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou 215123, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
机构:
Kwangwoon Univ, Dept Elect Mat Engn, 20 Kwangwoon Ro, Seoul 01897, South KoreaKwangwoon Univ, Dept Elect Mat Engn, 20 Kwangwoon Ro, Seoul 01897, South Korea
Kim, Seung-Tae
Cho, Won-Ju
论文数: 0引用数: 0
h-index: 0
机构:
Kwangwoon Univ, Dept Elect Mat Engn, 20 Kwangwoon Ro, Seoul 01897, South KoreaKwangwoon Univ, Dept Elect Mat Engn, 20 Kwangwoon Ro, Seoul 01897, South Korea
机构:
Kwangwoon Univ, Dept Elect Mat Engn, 447-1 Wolgye Dong, Seoul 139701, South KoreaKwangwoon Univ, Dept Elect Mat Engn, 447-1 Wolgye Dong, Seoul 139701, South Korea
Kang, Min-Soo
Cho, Won-Ju
论文数: 0引用数: 0
h-index: 0
机构:
Kwangwoon Univ, Dept Elect Mat Engn, 447-1 Wolgye Dong, Seoul 139701, South KoreaKwangwoon Univ, Dept Elect Mat Engn, 447-1 Wolgye Dong, Seoul 139701, South Korea
机构:
Peking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R ChinaPeking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
Chang, Kuan-Chang
Dai, Tianjiao
论文数: 0引用数: 0
h-index: 0
机构:
Peking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R ChinaPeking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
Dai, Tianjiao
Li, Lei
论文数: 0引用数: 0
h-index: 0
机构:
Peking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 40227, TaiwanPeking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
Li, Lei
Lin, Xinnan
论文数: 0引用数: 0
h-index: 0
机构:
Peking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R ChinaPeking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
Lin, Xinnan
Zhang, Shengdong
论文数: 0引用数: 0
h-index: 0
机构:
Peking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R ChinaPeking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
Zhang, Shengdong
Lai, Ying-Chih
论文数: 0引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 40227, TaiwanPeking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
Lai, Ying-Chih
Liu, Heng-Jui
论文数: 0引用数: 0
h-index: 0
机构:
Natl Chung Hsing Univ, Dept Mat Sci & Engn, Taichung 40227, TaiwanPeking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
Liu, Heng-Jui
Syu, Yong-En
论文数: 0引用数: 0
h-index: 0
机构:
Natl Sun Yat Sen Univ, Dept Phys, Kaohsiung 804, Taiwan
Natl Sun Yat Sen Univ, Inst Mat & Optoelect, Kaohsiung 804, TaiwanPeking Univ, Sch Elect & Comp Engn, Shenzhen Grad Sch, Shenzhen 518055, Peoples R China
机构:
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Qi, Y. F.
Zhao, C. Z.
论文数: 0引用数: 0
h-index: 0
机构:
Xi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou, Peoples R China
Univ Liverpool, Dept Elect Engn & Elect, Liverpool, Merseyside, England
Xian Jiatong Liverpool Univ, AI Univ Res Ctr AI URC, Suzhou, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Zhao, C. Z.
Zhao, C.
论文数: 0引用数: 0
h-index: 0
机构:
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou, Peoples R China
Univ Liverpool, Dept Elect Engn & Elect, Liverpool, Merseyside, England
Xian Jiatong Liverpool Univ, AI Univ Res Ctr AI URC, Suzhou, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Zhao, C.
Mitrovic, I. Z.
论文数: 0引用数: 0
h-index: 0
机构:
Univ Liverpool, Dept Elect Engn & Elect, Liverpool, Merseyside, EnglandXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Mitrovic, I. Z.
Xu, W. Y.
论文数: 0引用数: 0
h-index: 0
机构:
Shenzhen Univ, Coll Mat Sci & Engn, Shenzhen, Peoples R ChinaXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Xu, W. Y.
Yang, L.
论文数: 0引用数: 0
h-index: 0
机构:
Xian Jiaotong Liverpool Univ, Dept Chem, Suzhou, Peoples R China
Univ Liverpool, Dept Chem, Liverpool L69 7ZD, Merseyside, EnglandXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Yang, L.
Shen, Z. J.
论文数: 0引用数: 0
h-index: 0
机构:
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou, Peoples R China
Univ Liverpool, Dept Elect Engn & Elect, Liverpool, Merseyside, EnglandXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
Shen, Z. J.
He, J. H.
论文数: 0引用数: 0
h-index: 0
机构:
Xian Jiaotong Liverpool Univ, Dept Elect & Elect Engn, Suzhou, Peoples R China
Univ Liverpool, Dept Elect Engn & Elect, Liverpool, Merseyside, EnglandXi An Jiao Tong Univ, Sch Elect & Informat Engn, Xian, Peoples R China
He, J. H.
2019 JOINT INTERNATIONAL EUROSOI WORKSHOP AND INTERNATIONAL CONFERENCE ON ULTIMATE INTEGRATION ON SILICON (EUROSOI-ULIS),
2019,
机构:
Korea Inst Sci & Technol, Inst Adv Composite Mat, Funct Composite Mat Res Ctr, Seoul 55324, Jeollabuk Do, South KoreaJeonbuk Natl Univ, LANL JBNU Engn Inst Korea, Dept Flexible & Printable Elect, 567 Baekje Daero, Jeonju 54896, South Korea
Yang, Hee Yun
Choi, Hyejung
论文数: 0引用数: 0
h-index: 0
机构:
SK Hynix Inc, R&D Div, Icheon Si 17336, Gyeonggi Do, South KoreaJeonbuk Natl Univ, LANL JBNU Engn Inst Korea, Dept Flexible & Printable Elect, 567 Baekje Daero, Jeonju 54896, South Korea
Choi, Hyejung
Moon, Byung Joon
论文数: 0引用数: 0
h-index: 0
机构:
Korea Inst Sci & Technol, Inst Adv Composite Mat, Funct Composite Mat Res Ctr, Seoul 55324, Jeollabuk Do, South Korea
Jeonbuk Natl Univ, Acad Convergence Res, Dept JBNU KIST Ind, 567 Baekje Daero, Jeonju 54896, South KoreaJeonbuk Natl Univ, LANL JBNU Engn Inst Korea, Dept Flexible & Printable Elect, 567 Baekje Daero, Jeonju 54896, South Korea
Moon, Byung Joon
Bae, Sukang
论文数: 0引用数: 0
h-index: 0
机构:
Korea Inst Sci & Technol, Inst Adv Composite Mat, Funct Composite Mat Res Ctr, Seoul 55324, Jeollabuk Do, South Korea
Jeonbuk Natl Univ, Acad Convergence Res, Dept JBNU KIST Ind, 567 Baekje Daero, Jeonju 54896, South KoreaJeonbuk Natl Univ, LANL JBNU Engn Inst Korea, Dept Flexible & Printable Elect, 567 Baekje Daero, Jeonju 54896, South Korea
Bae, Sukang
Yoon, Jongwon
论文数: 0引用数: 0
h-index: 0
机构:
Korea Inst Mat Sci, Energy & Environm Mat Res Div, Changwon Si 51508, Gyeongsangnam D, South KoreaJeonbuk Natl Univ, LANL JBNU Engn Inst Korea, Dept Flexible & Printable Elect, 567 Baekje Daero, Jeonju 54896, South Korea