Problems on fabrication of computer-generated holograms for testing aspheric surfaces

被引：10

作者：

Ma, Jun ^{[1
]}

Gao, Zhishan ^{[1
]}

Zhu, Rihong ^{[1
]}

He, Yong ^{[1
]}

Chen, Lei ^{[1
]}

Li, Jianxin ^{[1
]}

Pun, E. Y. B. ^{[2
]}

Wong, W. H. ^{[2
]}

Huang, Lihui ^{[2
]}

Xie, Changqing ^{[3
]}

Zhu, Xiaoli ^{[3
]}

Ma, Jie ^{[3
]}

机构：

[1] Nanjing Univ Sci arid Technol, Dept Opt Engn, Nanjing 210094, Peoples R China

[2] City Univ Hong Kong, Dept Elect Engn, Kowloon Tang, Hong Kong, Peoples R China

[3] Chinese Acad Sci, Key Lab Nanofabricat & Novel Devices Integrated T, Inst Microelect, Beijing 100029, Peoples R China

来源：

CHINESE OPTICS LETTERS | 2009年 / 7卷 / 01期

关键词：

ERROR ANALYSIS; ELEMENTS; DESIGN;

D O I：

10.3788/COL20090701.0070

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Interferometric optical testing using computer-generated hologram (CGH) can give highly accurate measurement of aspheric surfaces has been proved. After the system is designed, a phase function is obtained according to the CGH's surface plane. For the requirement of accuracy, an optimization algorithm that transfers the phase function into a certain mask pattern file is presented in this letter, based on the relationship between the pattern error of CGH and the output wavefront accuracy. Then the writing machine is able to fabricate such a mask with this kind of file. With that mask, an improved procedure on fabrication of phase type CGH is also presented. Interferometric test results of an aspheric surface show that the whole test system obtains the demanded accuracy.

引用

页码：70 / 73

页数：4

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